SIPLACE CA4 V2规格说明书.pdf - 第50页
50 Technical data Spacing distances with SIPLACE Wafer System All dimensions in millimeters. Machine center to SWS = SWS out side: 2039 mm / SWS innermost:18 89 mm

50
Technical data
Spacing distances with SIPLACE Wafer System
All dimensions in millimeters.
Machine center to SWS = SWS outside: 2039 mm / SWS innermost:1889 mm

51
Technical data
Dimensions with JTF-M
All dimensions in millimeters.
