SIPLACE CA4 V2规格说明书.pdf - 第50页

50 Technical data Spacing distances with SIPLACE Wafer System All dimensions in millimeters. Machine center to SWS = SWS out side: 2039 mm / SWS innermost:18 89 mm

100%1 / 64
49
Technical data
Spacing distances dual lane conveyor
Fixed conveyor side at maxi-
mum right position
a
.
a) The value depends on the position of the fixed side. See table of adjustable side positions on page 17. All dimensions in
millimeters.
Fixed conveyor side at maxi-
mum left position
a
.
50
Technical data
Spacing distances with SIPLACE Wafer System
All dimensions in millimeters.
Machine center to SWS = SWS outside: 2039 mm / SWS innermost:1889 mm
51
Technical data
Dimensions with JTF-M
All dimensions in millimeters.