SPF维修.pdf - 第59页
Stage Fixed rail guide Reference mark OK NG Position error Stage Y axis motor Coupling Coupling bolt Motor bolt Reference mark Stage Y axis motor SPF 4.2 Lower Section Unit : Others SERVICE MANUAL 4.2−6 D54SEC−W4−600−B0 …
(−) limit sensor
(+) limit sensor
Origin sensor
Origin
Mechanical stopper
(−) limit
0
28
−4
−2
Stroke related diagram
(+) limit
27±0.5
+0.5
0
+0.5
−1.0
Mechanical stopper
4.2 Lower Section Unit : Others
SERVICE MANUAL
SPF
4.2−5
D54SEC−W4−600−B0
8. If not within the specification, turn “SERVO
MOTOR” on the main control panel [OFF].
9. Move the stage to any position where you can
adjust it easily.
10. Attach the dial gauge to the rail guide.
11. Zero the dial gauge.
12. Loosen the cotters.
13. Rotate the pulley and adjust the height.
14. Tighten the cotters.
15. Check the height of the height measuring jig and
the rail guide again.
16. Adjust the dog so that the origin sensor detects
correctly.
17. Turn “SERVO MOTOR” on the main control
panel [ON].
18. Return to origin of the ST axis and check the
origin sensor detects correctly again.
=CHECK=
Be sure to check the symmetry of the origin
sensor.
19. Check the height of the stage, the loader rail and
the unloader rail.
=CHECK=
Make sure that there is no interference for the
PCB transfer.
20. Check the height of the screen holder as the basis
for the stage height.
21. Check the (±) limit sensors.
=Specification=
(+) limit : 27±0.5
(−) limit : −2
+0.5
−1.0
Cotters
ST axis motor
Pulley
Bracket
Bolt (A)
Bolt (B)
Stage
Fixed rail guide
Reference mark
OK
NG
Position error
Stage Y axis motor
Coupling
Coupling bolt
Motor bolt
Reference mark
Stage Y axis motor
SPF
4.2 Lower Section Unit : Others
SERVICE MANUAL
4.2−6
D54SEC−W4−600−B0
4.2.4 SY Axis (Stage Y Axis) Origin Adjustment
Unit No. 1080804200
SY Axis (Stage Y Axis) Origin
Adjustment
4.2.1 SY Axis (Stage Y Axis)
Motor Replacement
SY axis origin adjustment
1. Turn the power [ON] and return to origin.
2. Move the SY axis (stage Y axis) to 150mm.
3. Move the ST axis to 26mm.
4. Move the CY axis to 624.5mm.
5. Turn “RECOG LIGHT RING” on the sub control
panel [ON].
6. Check visually that the reference mark matches
with the center of the cross line on the monitor
screen.
7. If not, loosen the coupling bolt on the ball screw
side.
8. Rotate the ball screw while watching the monitor
screen until the reference mark matches with the
center of the cross line on the monitor screen.
9. Tighten the coupling bolt on the ball screw side.
10. Check that the sensor dog matches with the origin
sensor.
11. If not, move the sensor dog and the sensor until it
matches.
Slow
Origin
(+) mechanical stopper
(−) mechanical stopper
(−) limit
15
798.5
0
(+) limit
790
785
−10
−5
−15.5
(+) safety limit
(−) safety limit
Stroke related diagram
Slow range
4.2 Lower Section Unit : Others
SERVICE MANUAL
SPF
4.2−7
D54SEC−W4−600−B0
12. Check the (±) limit sensors.
=Specification=
(+) safety limit : 790±2mm
(+) limit : 785±1mm
Slow limit : 15 ±1mm
(−) limit : −5±1mm
(−) safety limit : −10±2mm