SPF维修.pdf - 第65页
SPF 4.2 Lower Section Unit : Others SERVICE MANUAL 4.2−12 D54SEC−W4−600−B0 14. Check the coplanarity of the adjustment bolts (4 pcs.) again. 15. Attach the support plate. 16. Check the coplanarity of the support plate ag…
4.2 Lower Section Unit : Others
SERVICE MANUAL
SPF
4.2−11
D54SEC−W4−600−B0
4.2.7 Support Plate Coplanarity Adjustment
Unit No. 1080804300
Support Plate Coplanarity
Adjustment
Maintenance Manual /
MAINTENANCE GUIDE / Fixed
and Movable Rail Guide
Coplanarity Adjustment
=Preparation=
1. Maximum PCB
2. (−) driver
3. Dial gauge
4. Magnet stand
5. Support height adjustment jig
Support plate coplanarity adjustment
1. Turn the power [ON] and return to origin.
2. Move the movable rail to the width of the
maximum PCB.
3. Move the SY axis (stage Y axis) to 150mm.
4. Set the support height adjustment jig at the point
A on the support plate.
5. Attach the magnet stand to the camera axis
frame.
6. Touch the dial gauge to the support height
adjustment jig upper surface.
7. Zero the dial gauge.
8. Move the support height adjustment jig at the
point B on the support plate.
9. Check the coplanarity of the support height
adjustment jig upper surface.
=CHECK=
Be sure to check the coplanarity of the point
C to the point I.
=Specification=
Coplanarity : Within 0.1mm
10. If not within the specification, remove the nut (J)
of the adjustment bolt to remove the support
plate.
11. Check the coplanarity of the adjustment bolts (4
pcs.).
=Specification=
Coplanarity : Within 0.1mm
12. If not within the specification, loosen the nut
(K) and adjust the coplanarity with using the (−)
driver.
13. Tighten the nut (K).
G
C
F
I
B
E
H
A
D
Reference 0
Adjustment bolt
Nut (K)
Nut (J)
Frame
Support plate
Support plate
Camera axis frame
SPF
4.2 Lower Section Unit : Others
SERVICE MANUAL
4.2−12
D54SEC−W4−600−B0
14. Check the coplanarity of the adjustment bolts
(4 pcs.) again.
15. Attach the support plate.
16. Check the coplanarity of the support plate
again.
G
C
F
I
B
E
H
A
D
Reference 0
Adjustment bolt
Nut (K)
Nut (J)
Frame
Support plate
Support plate
Camera axis frame
4.3 Upper Section Positioning Related Matter
SERVICE MANUAL
SPF
4.3−1
D54SEC−W1−000−B0
4.3 Upper Section Positioning Related Matter
D54SEC−W1−000−B0
Sentence No.
4.3.1 SCX Axis (Screen Compensated Axis) Origin Adjustment
Unit No.
SCX Axis (Screen
Compensated Axis) Origin
Adjustment
4.3.4 SCX Axis (Screen
Compensated Axis) Motor
Replacement
=Preparation=
1. Mark plate jig
SCX axis origin adjustment
1. Turn the power [ON] and return to origin.
2. Fix the mark plate jig to the screen position
compensated table with bolts (4 pcs).
3. Move the CY axis (Camera Y axis) to 490mm.
4. Move the CX axis (Camera X axis) to 165mm for
M size, and move it to 255mm for XL size.
5. Turn “RECOG LIGHT RING” on the sub control
panel [ON].
6. Check that the camera mark matches in the
center of the cross line on the monitor screen.
7. If not, loosen the coupling bolt on the ball screw
side.
8. Rotate the ball screw while watching the monitor
screen, adjust the camera mark position until it
matches in the center of the cross line on the
monitor screen.
9. Tighten the coupling bolt on the ball screw side.
10. Check that the origin sensor detects correctly.
11. Move the sensor dog and check the each limit.
Camera mark
Mark plate jig
Mark plate jig
Screen position compensated table
Camera mark monitor
OK NG
Camera cross line
Camera cross line
Position error
165
165
255
255