4OM-1050-002.pdf - 第31页

Fig. 4A17 1.3 Maintenance Spots 0207-004 1-18 AFO01ETRP

100%1 / 345
(7) X/Y Table Section
1.3 Maintenance Spots
0207-004 1-17 AFO01ETRP
Fig. 4A16
Fig. 4A17
1.3 Maintenance Spots
0207-004 1-18 AFO01ETRP
(8) Light Source Device for Component Recognition
1.3 Maintenance Spots
0207-004 1-19 AFO01ETRP
Fig. 4A18
Fig. 4A19