IPC-TM-650 EN 2022 试验方法1.pdf - 第105页
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IPC-DD-135
Figure 1 Cross-Section Planarization Diagram
Figure 2 Top View of Planarization Structure
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S-Filter:
Low mag lens, larger beam spot, high
S-filter value
High mag lens, smaller beam spot, low
S-filter value
Vs.
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