IPC-TM-650 EN 2022 试验方法1.pdf - 第110页
S-Filter: Lo w ma g lens , larger beam spot, high S-filter val ue High mag lens, smal ler b eam spot, low S-filter val ue Vs . Page 3 of 5
Height 9 mm
x 200 µm (width); centered on the xy axis
Center point of Measurement spot and Standard
Grain direction of the standard is across the width
Measurement standard minimum size 1000 µm (height)
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S-Filter:
Low mag lens, larger beam spot, high
S-filter value
High mag lens, smaller beam spot, low
S-filter value
Vs.
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F-Operation
L-Filter
Surface roughness
Surface waviness
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