IPC-TM-650 EN 2022 试验方法1.pdf - 第111页
F-Operation L-Filter Surf ace roughness Surf ace wa viness Page 4 of 5
S-Filter:
Low mag lens, larger beam spot, high
S-filter value
High mag lens, smaller beam spot, low
S-filter value
Vs.
Page 3 of 5
F-Operation
L-Filter
Surface roughness
Surface waviness
Page 4 of 5
Main image (Height) S-L surface Material ratio curve
Angular spectrum
Autocorrelation function
2.66um
Page 5 of 5