IPC-TM-650 EN 2022 试验方法1.pdf - 第302页
ASTM D 618 Page 1 of 2
IPC-TM-650
Number
Subject Date
Revision
Page 2 of 2
ASTM D 618
Page 1 of 2
Figure 1
Film Thickness ( m)
Curvature
Slope = 3.3
Wafer Deformation ( m)
IPC-TM-650
Number
Subject Date
Revision
Page 2 of 2