IPC-TM-650 EN 2022 试验方法1.pdf - 第303页
Figure 1 F i l m T h i c k n e s s ( m ) C u r v a t u r e Sl o p e = 3 . 3 W a f e r D e fo r m a t i o n ( m ) IPC-TM-650 Number Subject Date Revision Page 2 of 2
ASTM D 618
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Figure 1
Film Thickness ( m)
Curvature
Slope = 3.3
Wafer Deformation ( m)
IPC-TM-650
Number
Subject Date
Revision
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IPC-TM-650
MIL-F-14256
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