MIL- STD-883F 2004 TEST METHOD STANDARD MICROCIRCUITS.pdf - 第326页
MIL-STD-883F METHOD 2018.4 18 June 2004 14 STATIONARY (EVAPORATION) W AFER-HOLDER SYSTEM FIGURE 2018-4. W afer sampli ng procedur es (s ee table I ) . *
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METHOD 2018.4
18 June 2004
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FIGURE 2018-3. Viewing angle
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MIL-STD-883F
METHOD 2018.4
18 June 2004
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STATIONARY (EVAPORATION) WAFER-HOLDER SYSTEM
FIGURE 2018-4. Wafer sampling procedures (see table I)
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METHOD 2018.4
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ROTATING STATIONARY (SPUTTERING) PLANETARY OR CONTINUOUS FEED WAFER-HOLDER SYSTEM
FIGURE 2018-4. Wafer sampling procedures (see table I)
- Continued.
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