00195988-02_IM_SWS-Software-2.1_DE_EN.pdf - 第123页
Installation Manual SIPLACE SWS Software 2.1 Edition 05/2014 123 3.3.2 Inst allation Press any button to access the st art window . 3 Fig. 64 Pressing any button to access the start window . Use the arrow keys to nav…
Installation Manual SIPLACE SWS Software 2.1
Edition 05/2014
122
3.3 Installation with Wafer Map Server Network Configuration
Perform the installation with the network configuration for the wafer map server. 3
3
3.3.1 General
3
Fig. 63 Network overview SWS to wafer map server
The networks SWS => Wafermap Server and SWS =>Station each have their own Ethernet
hubs. 3
The LAN2 slot is at the bottom. 3
PLEASE NOTE
Wafer map server settings
Please ask your administrator for the wafer map server settings.
Installation Manual SIPLACE SWS Software 2.1
Edition 05/2014
123
3.3.2 Installation
Press any button to access the start window.
3
Fig. 64 Pressing any button to access the start window.
Use the arrow keys to navigate to the Setup Tool.
3
Fig. 65 Start window
Confirm the SetupTool with Enter.
Installation Manual SIPLACE SWS Software 2.1
Edition 05/2014
124
3
Fig. 66 Entry of capwd
Press and hold the CTRL + SHIFT keys and enter the following: capwd
3
Fig. 67 Entry of password
Enter your password.
Confirm with Enter.