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FX-3R Maintenance Guide 9-6 9-4. Replacing the Vacuum Pump Parts The reference replacement timing for the consumable parts listed below is one year after startin g of the operation. Replace or clean the consumable parts …

FX-3R Maintenance Guide

9-5

[U] button [V] button

[LED] panel

[SET] button

Figure 9-3-1-1 Digital Pressure Switch

1) Setting the display mode and hysteresis mode

c Keep the

button pressed for 2 sec. or longer. The display will become . (The

operation enters the display color setting mode.)

d Press the

or button to display . After that, press the button.

(When the switch is turned ON, this is displayed in green.)

e Press the

or button to display . After that, press the button. (The

operation enters the hysteresis setting mode.)

f Press the

or button to display . After that, press the button. (The

normally open operation is set.)

g Press the

or button to display . After that, press the button. (The

response time is set at 2.5 ms or less.)

h Press the

or button to display . After that, press the button. (The

manual set mode is set.)

i The numeric value is displayed in this step, and then the operation is returned to the

measurement mode.

2) Setting a detection level (threshold value and hysteresis)

c In the measurement mode, press the

button. and current threshold value are

displayed alternately.

d Press the

or button. The numeric value at the least significant digit starts flashing.

Subsequently, press the

or button to increase or decrease the numeric value.

e When pressing the

button, the flashing digit moves left.

f Perform operation steps d and e to display

. Keep the button pressed for 2

sec. or longer. (The threshold value is then set to “−60.0kPa”.)

and current set value are displayed alternately. Press the button.

and current hysteresis value are displayed alternately.

i Press the

or button. The numeric value at the least significant digit starts flashing.

Subsequently, press the

or button to increase or decrease the numeric value.

j When pressing the

button, the flashing digit moves left.

k Perform operation steps h and j to display

. Keep the button pressed for 2

sec. or longer. (The hysteresis value is then set to “0.50kPa”.)

l The operation is then returned to the measurement mode. The settings are then completed.

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FX-3R Maintenance Guide

9-6

9-4. Replacing the Vacuum Pump Parts

The reference replacement timing for the consumable parts listed below is one year after starting of

the operation. Replace or clean the consumable parts while referring to the procedure below. All

parts that need to be replaced are included in the consumable part set (part No. 40068178).

[List of Replacement Parts] (Consumable part set part No.: 40068178)

Table 9-4-1 Consumable Parts for Vacuum Pump

Inspection location Q’ty

Contents Method

Suction valve interference

prevention rubber

Check for deformation, wear, hardening, or

crack.

Visual check

Suction and exhaust

valves

Check for deformation, hardening, or

chipping.

Visual check

Exhaust valve backup 4 Check for unusual wear, hardening, or crack. Visual check

Cup packing 4 Check for unusual wear, hardening, or crack. Visual check

Gasket 4 Check for deformation, hardening, or crack. Visual check

Inside of

vacuum

pump

Suction valve backup 4 Check for unusual wear, hardening, or crack. Visual check

Nylon tube 4 Check for deformation Visual check

External

parts

Silencer 1 Check for deformation Visual check

1) Make sure that the vacuum pump c is not operated.

(Great care should be taken since the vacuum pump is hot immediately after it has been

stopped.)

2) Open the cover of the electrical component unit.

SL6061292TN

SEMS cap bolt with washer

M6×12

WP0841601SC

Flat washer M8

c 40047064

Vacuum pump

assembly

d Pump support

Figure 9-4-1 Vacuum Pump

3) Disconnect the air tubes from the vacuum pump. Remove the pump support d with an Allen

wrench.

4) Pull out the vacuum pump from the main unit. (Pay special attention to the cables when pulling

out the vacuum pump.)

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FX-3R Maintenance Guide

9-7

5) Open the cover of the terminal box and

disconnect the cables e from the terminal block.

Figure 9-4-2 Disconnecting the Cables

6) Loosen the hexagon socket head cap bolts (M6 × L16)

fixing the handle with an Allen wrench having a width

between across flats of 5 mm.

Figure 9-4-3 Removing the Bolts

7) Detach the handle and panel.

Figure 9-4-4 Detaching the

Handle and Panel

8) Place the pump vertically so that the head to be replaced is located at the top.

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