ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第113页

SECTION 9 Part No Description Rev Page 01-E12630 (MOXS) ADIC OUTPUT MAGAZINE HANDLER A 9-1 01-E12094 (OUT) ELEVATOR (SHORT MAG,300MM) ASSY A 9-2 01-42688 (OUT) ELEVATOR GRIPPER ASSY (SHORT MAG) I 9-3 01-31710 (OUT) UPPER…

(BH83) BOND HEAD - THERMAL CONTROL

8-8

Pneumatic System For (Bh83) Bond Head - Thermal Control

两种破真空模式

稳气模式

放在下机架，提前开

SECTION 9

Part No Description Rev Page

01-E12630 (MOXS) ADIC OUTPUT MAGAZINE HANDLER A 9-1

01-E12094 (OUT) ELEVATOR (SHORT MAG,300MM) ASSY A 9-2

01-42688 (OUT) ELEVATOR GRIPPER ASSY (SHORT MAG) I 9-3

01-31710 (OUT) UPPER GRIPPER ASSY D 9-4

01-43498 (OUT)LOWER GRIPPER ASSY C 9-5

01-E12095 (OUT) UPPER PLATFORM ASSY A 9-6

01-25570 (MI) MAG SNR ASSY, UPPER PLATFORM A 9-8

01-E12096 (MO) BASIC SUPPORT 300MM A 9-9

01-46260 BASE MAGAZINE READY SENSOR ASSY A 9-11

01-46261 BASE MAGAZINE DETECTING SENSOR ASSY A 9-12

S01-17442 (MI) DRIVEN PULLEY ASSY B 9-13