ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第179页
(WT83) WAFER T ABLE 12-25 Pneumatic System For (Wt83) Wafer Table
(WT83) WAFER TABLE
12-24
Module Sensors / Encoders Location For (Wt83) Wafer Table
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER TABLE
01-E04281
CS-01-E04281
11
FROM: 01-E04281_F_2011.02.08
F1
F
Y Home Sensor
Rotating Ting Home Sensor
Front Safety Sensor
X Encoder
X Home Sensor
Y Encoder
Y Home Sensor
Inner Ring Upper/Down Check Sensor
Top Plate Upper/Down Limit Sensor
02-74496
02-74484
02-74497
02-74495
02-74491
Wafer Exist Sensor
02-74499
02-74483
02-74482
02-74490
53-40238-1S
53-40238-1S
Wafer Exist Sensor
(WT83) WAFER TABLE
12-25
Pneumatic System For (Wt83) Wafer Table
