ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第175页
(WT83) WAFER TABL E 12-21 5 01-61019 (WL) Y DRIVEN ASSY B ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTOMER SERVICE DRAWING ASM C USTOMER SERVI CE DRA WING ASM CUSTOMER S ERVICE DRA WING ASM C U…
(WT83) WAFER TABLE
12-20
4 01-61017 (WL) LOADER Y ARM ASSY F
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WL) LOADER Y ARM ASSY
01-61017
CS-01-61017
11
FROM: 01-61017_E_2010.10.08
E1
E
ITEM PART NO. DESCRIPTION QTY.
1 23-40043 DOWEL PIN D3 X L10, SST 2
2 26-E90754 (WL) LM BLK MNT 1
3 26-E90755 (WL) BELT CLAMP 1
4 26-F04483 (WL) CABLE SUPPORT BRACKET 1
5 26-F45388 (WL) WAFER LOADER ARM 1
6 26-F63144 (WT) WAFER LOADER HOME SNR FLAG 1
Assembly View
1
2
3
6
4
5
(WT83) WAFER TABLE
12-21
5 01-61019 (WL) Y DRIVEN ASSY B
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WL) Y DRIVEN ASSY
01-61019
CS-01-61019
11
FROM: 01-61019_B_2011.02.08
B1
B
ITEM PART NO. DESCRIPTION QTY.
1 01-38072 (WL) DRIVIEN PULLEY (T2.5, 21T, W4) 1
2 01-E12171 (WL) IDLER PULLEY ASSY 1
3 26-E90759 (WL) DRIVEN PULLEY MNT 1
Assembly View
3
2
1
(WT83) WAFER TABLE
12-22
6 01-E04239 (WL83) LOADER CLAMP ASSY B
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WL83) LOADER CLAMP ASSY
01-E04239
CS-01-E042 39
11
FROM: 01-E04239_B_2010.10.15
B1
B
ITEM PART NO. DESCRIPTION QTY.
1 02-74498 (WL83) WAFER EXIST SNR & CABLE ASSY 1
2 23-40043 DOWEL PIN D3 X L10, SST 2
3 24-11020-1 FLANGE BEARING 2X5X2.3 F682ZZ 4
4 26-57459 (WH) MA, FIX CLAMP MEMBRANE 2
5 26-E24142 (WL) PIVOT SPACER 4
6 26-E24143 (WL) PIVOT SHAFT 2
7 26-E24144 (WL) SEALING COVER 2
8 26-E24145 (WL) PLUNGER 2
9 26-E24147 (WL) FLAG, GUIDING BLOCK 3
10 26-E24152 (WL) GUIDING BLOCK COVER 1
11 26-E24153 (WL) WAFER EXIST SPRING ROD 1
12 26-E90760 (WL) HOOK BODY 1
13 26-E90761 (WL) HOOK BODY COVER - LOWER 1
14 26-E90762 (WL) HOOK BODY COVER - UPPER 1
15 26-E90763 (WL) FLAG, GUIDING BLOCK (B) 1
16 26-E90764 (WL) HOOK - LOWER 1
17 26-E90765 (WL) HOOK - UPPER 1
18 26-E90766 (WL) WAFER EXIST FLAG 1
19 31-40469 BARB FITTING M-3AU-3 2
20 75-20071 EXTENSION SPRING SSE-007A-5 1
21 875-20019 COMPRESSION SPRING D10720 2
Assembly View
2
3
4
5
6
7
8
9
10
12
13
14
15
16
17
18
19
21
1
A
DETAIL A
11
20