ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第155页
12-1 Section 12 01-E04281 (WT83) WAFER TABLE F ASM CUSTOMER SERVICE D RAWING ASM CUS TOMER SERV ICE D RAWIN G ASM CUSTOMER SERV ICE DRAW ING A SM C USTOMER SERVICE DRA WING ASM CUSTOMER SERV ICE DRAW ING ASM CUST OMER SE…
01-61017 (WL) LOADER Y ARM ASSY F 12-20
01-61019 (WL) Y DRIVEN ASSY B 12-21
01-E04239 (WL83) LOADER CLAMP ASSY B 12-22
01-E04240 (WL83) Y DRIVING ASSY B 12-23
12-1
Section 12 01-E04281 (WT83) WAFER TABLE F
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS D W G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER TABLE
01-E04281
CS-01-E04281
11
FROM: 01-E04281_F_2011.02.08
F1
F
ITEM PART NO. DESCRIPTION QTY.
1 01-E04226 (WT83) WAFER TABLE Y-BASE 1
2 01-E04227 (WT83) WAFER TABLE X-BASE 1
3 01-E04228 (WT83) WAFER EXPANDER 1
Assembly View
1
3
NOTE: For the assembly positions of 01-61017,01-61019, 01-E04239,
01-E04240 ,24-00729 73-00389 , Please refer to 01-E04228 .
2
(WT83) WAFER TABLE
12-2
1 01-E04226 (WT83) WAFER TABLE Y-BASE D
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT83) WAFER TABLE Y-BASE
01-E04226
CS-01-E042 26
11
FROM: 01-E04226_D_2011.02.07
D1
D
ITEM PART NO. DESCRIPTION QTY.
1 01-20329 (WT) Y-L LINEAR MOTOR ASSY 1
2 01-20330 (WT) Y-R LINEAR MOTOR ASSY 1
3 01-60544 (WT) Y HARD STOPPER ASSY 2
4 02-70031 (WT) Y MTR COIL ASSY 1
5 02-74482 (WT83) Y HOME SNR 1
6 24-00656 LM GUIDE SHS15V2UUFC1+700LF-II 1
7 26-E90947 (WT) Y TABLE BASE 1
8 26-F45907 (WT) LINEAR MOTOR COVER 2
9 26-F45908 (WT) LINEAR MOTOR COVER SPACER 2
10 53-70023 RGS-S SCALE (SELF-ADHESIVE) 1
Assembly View
7
10
1
A
DETAIL A
2
6
8
9
5
4
3