ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第160页

(WT83) WAFER T ABLE 12-6 ASM C USTOM ER SERV ICE DRAW ING ASM CU STOM ER S ERVIC E D RAWIN G ASM CUSTO MER S ERV ICE D RAW ING ASM CUST OM ER S ERVIC E DRAW IN G A SM C USTOMER S ERV ICE DRA W ING ASM CUST OM ER S ERV IC…

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(WT83) WAFER TABLE
12-5
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWIN G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAW INGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER S ERVICE DRAW INGASM CUSTOMER SERVICE DRAW ING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER S ERVICE DRAW INGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAW ING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWIN G ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER S ERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO .
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRA WING CONTAINS PROPRIETARY
ALL CA PA CITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
A ssembl y A uto ma t i o n Ltd .
A S M
DWG REV
(WT83) WAFER EXPANDER
01-E04228
CS-01-E04228
32
FROM: 01-E04228_H_2011.02.08
H1
H
37
41
42
43
44
48
49
50
1
3
5
10
27
16
17
20
28
39
A
DETAIL A
B
DETAIL B
D
DETAIL D
31
E
DETAIL E
2
22
21
38
F
DETAIL F
32
H
DETAIL H
I
DETAIL I
K
DETAIL K
35
15
L
DETAIL L
19
14
29
26
9
18
C
DETAIL C
11
G
DETAIL G
6
J
DETAIL J
33
4
7
8
40
46
51
45
30
25
36
ＮＯＴＥ：Ｔｈｅ　ｐａｒｔ　ｔａｂｌｅ　ｉｓ　ｏｎ　ｔｈｅ　ｐａｇｅ　１２－４
问题１：３＃是如何实现旋转导向的？
用大的回转支承轴承？
问题２：旋转过程中，４＃上下运
动，它是如何实现Ｚ向导向而不旋
转的？
上升到到位的时候
问题３：有时候４＃只旋转不升降，
这又是如何切换的？
问题４：４４＃放在４＃上是通过磁铁吸附？那
么它是如何与４＃定位的呢？
问题５：这个气缸的
具体作用是什么？
(WT83) WAFER TABLE
12-6
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER S ERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER S ERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRA WING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER EXPANDER
01-E04228
CS-01-E04228
33
FROM: 01-E04228_H_2011.02.08
H1
H
12
23
NOTE: The item 12,13,23,24,34,47 are not included in the assembly.
13
34
24
47
(WT83) WAFER TABLE
12-7
3.1 01-60546 (WT) ROTATING RING & PULLEY ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAW INGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAW INGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRA WING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT) ROTATING RING & PULLEY ASSY
01-60546
CS-01-60546
11
FROM: 01-60546_A_2009.11.14
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 01-60562 (WT) ROTATING RING & PULLEY 1
2 21-60005 SELF LOCKING NUT M5 3
3 24-00621 MINIATURE TYPE CAM FOLLOWER CFS5FV 3
4 26-E88729 (WT) INNER RING GUIDE BLOCK 3
5 26-E88730 (WT) ROTATING RING HOME FLAG 1
Assembly View
1
2
3
4
5