ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第168页
(WT83) WAFER TABL E 12-14 3.6 01-60554 (WT) TOP PLATE UP/DN SCREW (DRIVEN) J ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTO MER SERVIC E DRA WIN G ASM CUSTOMER SE RVICE DRAWING ASM CUST OMER SER…
(WT83) WAFER TABLE
12-13
3.5 01-60553 (WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER) I
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER)
01-60553
CS-01-60553
11
FROM: 01-60553_I_2010.10.08
I1
I
ITEM PART NO. DESCRIPTION QTY.
1 01-E09011 (WT) DRIVEN LEAD SCREW 1
2 23-60014 PARALLEL KEY B2 X H2 X L10 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E14906 (WH) BEARING SPACER 2
5 26-E26585 (WT) END WASHER 1
6 26-E26586 (WT) SET COLLAR D8 1
7 26-E26888 (WT) LEADSCREW NUT LOCK PLATE 1
8 26-E89091 (WT) A/C BEARING COVER FOR LS 1
9 26-F33801 (WT) TIMING BELT PULLEY (HTD 5,16T,W16) 1
10 26-F34927 (WT) NUT STOPPER FOR LEADSCREW 2
11 26-F34928 (WT) LOCKING NUT 2
Assembly View
1
3
4
5
6
7
8
9
10
11
2
(WT83) WAFER TABLE
12-14
3.6 01-60554 (WT) TOP PLATE UP/DN SCREW (DRIVEN) J
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) TOP PLATE UP/DN SCREW (DRIVEN)
01-60554
CS-01-60554
11
FROM: 01-60554_J_2010.10.08
J1
J
ITEM PART NO. DESCRIPTION QTY.
1 01-E09011 (WT) DRIVEN LEAD SCREW 1
2 23-60014 PARALLEL KEY B2 X H2 X L10 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E14906 (WH) BEARING SPACER 2
5 26-E26585 (WT) END WASHER 1
6 26-E26586 (WT) SET COLLAR D8 1
7 26-E26888 (WT) LEADSCREW NUT LOCK PLATE 1
8 26-E89091 (WT) A/C BEARING COVER FOR LS 1
9 26-F34927 (WT) NUT STOPPER FOR LEADSCREW 2
10 26-F34928 (WT) LOCKING NUT 2
Assembly View
3
4
5
6
7
8
9
10
1
2
梯形丝杠：３０３不锈钢
螺母：Ｂｒｏｎｚｅ
(WT83) WAFER TABLE
12-15
3.7 01-60557 (WT) ROTAING RING DRIVING SHAFT ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) ROTAING RING DRIVING SHAFT ASSY
01-60557
CS-01-60557
11
FROM: 01-60557_A_2010.10.08
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 20-45474 FLAT HD SOC SCREW M3 X 8 4
2 20-60478 SOC HD CAP SCREW M3 X 12 2
3 22-20103 WASHER SPRING M3 2
4 24-09007-1 A/C BALL BRG 8X22X7 708CTYDBC8P4 1
5 26-E26668 (WT) SET COLLAR D8.5 2
6 26-E26680 (WT) TIMING PULLEY (GT 3, 20T, W7) 1
7 26-E26765 (WT) A/C BEARING COVER, B22 1
8 26-E38192 (WT) TIMING PULLEY (HTD 3, 36T, W7) 1
9 26-E89097 (WT) ROTATING RING DRIVE SHAFT 1
10 26-E89100 LOCK NUT M8X0.75 T2 2
Assembly View
1
2
3
4
5
6
7
8
9
10