ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第137页
(WC83) WAFER CASSETTE EL EVATOR 10-5 Module Sensors / Encoders Location For (Wc83) Wafer Cassette Elevator ASM CUSTOMER SERV ICE DRAWING ASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERV ICE DRAWING ASM CUSTOMER SERVICE DRA…
(WC83) WAFER CASSETTE ELEVATOR
10-4
3 01-E07163 (WC) SAFETY GUARD ASSY B
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPA CITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
A ssembl y A ut omat i on Ltd.
A S M
DWG REV
(WC) SAFETY GUARD ASSY
01-E07163
CS-01-E07163
11
FROM: 01-E07163_B_2010.10.20
B1
B
ITEM PART NO. DESCRIPTION QTY.
1 01-43237 (WCGD) TOP SAFETY GUARD MNT 2
2 01-43241 (WCGD) UPPER SHAFT SLIDE BUSH 1
3 01-E07164 (WC) LOWER SHAFT SLIDE BUSH 1
4 02-76540 (WC) SAFETY GUARD, ENGAGE ON SNR 1
5 02-76541 (WC) SAFETY GUARD, ENGAGE OFF SNR 1
6 23-00006 DOWEL PIN D5 X L25 2
7 26-E41190 (WCGD) UPPER GUIDE SHAFT 1
8 26-E41191 (WCGD) LOWER GUIDE SHAFT 1
9 26-E41208 (WCGD) TOP SAFETY SNR FLAG 1
10 26-E46357 (WCGD) TOP SAFETY SNR FLAG LEFT 1
11 26-F40766 (WC) STAND RIGHT 1
12 26-F40767 (WC) STAND LEFT 1
13 26-F40768 (WC) BASE 1
14 26-F40838 (WC) BUMPER 1
15 26-F40839 (WC) WAFER GUARD 1
16 31-40427 MALE ELBOW KQ2H04-M5 2
17 32-00016 PNEU. CYLINDER, RODLESS, 10X200 1
18 53-40195 FORK SENSOR EE-SX674 2
Assembly View
6
7
8
10
11
12
14
17
1
2
4
5
NOTE:The item 4,5 are not included in the assembly.
15
9
13
16
18
3
(WC83) WAFER CASSETTE ELEVATOR
10-5
Module Sensors / Encoders Location For (Wc83) Wafer Cassette Elevator
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPA CITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WC83) WAFER CASSETTE ELEVATOR
01-E04282
CS-01-E04282
11
FROM: 01-E04282_C_2011.02.09
C1
C
Wafer Loader Z Sensor
53-40196
02-74503
53-40196
Z Home Sensor
Wafer Loader Z Sensor
53-40195
53-40195
Top Safety Left Sensor
Top Safety Right Sensor
(WC83) WAFER CASSETTE ELEVATOR
10-6
Pneumatic System For (Wc83) Wafer Cassette Elevator