ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第138页
(WC83) WAFER CASSETTE EL EVATOR 10-6 Pneumatic System For (Wc 83) Wafer Cassette Elevator
(WC83) WAFER CASSETTE ELEVATOR
10-5
Module Sensors / Encoders Location For (Wc83) Wafer Cassette Elevator
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPA CITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WC83) WAFER CASSETTE ELEVATOR
01-E04282
CS-01-E04282
11
FROM: 01-E04282_C_2011.02.09
C1
C
Wafer Loader Z Sensor
53-40196
02-74503
53-40196
Z Home Sensor
Wafer Loader Z Sensor
53-40195
53-40195
Top Safety Left Sensor
Top Safety Right Sensor
(WC83) WAFER CASSETTE ELEVATOR
10-6
Pneumatic System For (Wc83) Wafer Cassette Elevator
SECTION 11
Part No Description Rev Page
01-E04291 (EJ83) DIE EJECTOR F 11-1
S01-E09330 (EJ) MP KIT - STRONG VAC. A 11-2
S01-E09498 (EJ) MP KIT - M11A3 (STRONG VAC.) A 11-3
01-E04256 (EJ83) PNEU ASSY D 11-4
01-E08478 (EJ) EJCECTOR TABLE ASSY. F 11-5
01-E08739 (EJ) 8312 SMALL DIE EJECTOR ASSY B 11-7
01-E01867 (EJ) EJECTOR DRIVING CORE ASSY I 11-8
01-E01913 (EJ) SHAFT/CAGE HOLDER ASSY D 11-9