ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第171页
(WT83) WAFER TABL E 12-17 3.9 01-62979 (WT) EXPANDER INSIDE IDLER ASSY A ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTOMER SERVICE DRAWING ASM C USTOMER SERVI CE DRA WING ASM CUSTOMER S ERVICE D…
(WT83) WAFER TABLE
12-16
3.8 01-60558 (WT) ROTATING RING ENCODER IDLER B
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) ROTATING RING ENCODER IDLER
01-60558
CS-01-60558
11
FROM: 01-60558_B_2010.10.08
B1
B
ITEM PART NO. DESCRIPTION QTY.
1 20-45474 FLAT HD SOC SCREW M3 X 8 4
2 20-60478 SOC HD CAP SCREW M3 X 12 1
3 22-20103 WASHER SPRING M3 1
4 24-00151 BALL BEARING 689 2
5 26-E26668 (WT) SET COLLAR D8.5 1
6 26-E26680 (WT) TIMING PULLEY (GT 3, 20T, W7) 1
7 26-E38682 (WT) BEARING COVER, B17 1
8 26-E89100 LOCK NUT M8X0.75 T2 2
9 26-E89101 (WT) ROTATING RING IDLER SHAFT 1
Assembly View
1
2
3
4
5
6
7
8
9
(WT83) WAFER TABLE
12-17
3.9 01-62979 (WT) EXPANDER INSIDE IDLER ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) EXPANDER INSIDE IDLER ASSY
01-62979
CS-01-62979
11
FROM: 01-62979_A_2010.10.14
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 19-00009 RETAINING RING FOR SHAFT 6MM STWS6 1
2 21-60004 SELF LOCKING NUT M4 1
3 24-11113 BEARING MF106ZZS 2
4 26-E26603 (WT) BEARING SPACER (OD7, ID6, W1) 1
5 26-E26648 (WT) IDLER MNT 1
6 26-E97075 (WT) IDLER PULLEY SHAFT 1
7 26-F33802 (WT) TIMING BELT IDLER (HTD 5,16T,W16) 1
Assembly View
1
2
3
4
5
6
7
(WT83) WAFER TABLE
12-18
3.10 01-64703 (WT) RING ROTATE TENSION FLAT IDLER ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT) RING ROTATE TENSION FLAT IDLER ASSY
01-64703
CS-01-64703
11
FROM: 01-64703_A_2010.10.14
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 19-00009 RETAINING RING FOR SHAFT 6MM STWS6 1
2 20-60476 SOC HD CAP SCREW M3 X 10 2
3 20-70519 SOC SET CUP SCREW M4 X 14 1
4 21-60004 SELF LOCKING NUT M4 1
5 22-20003 WASHER FLAT M3 2
6 22-20004 WASHER FLAT M4 1
7 22-20103 WASHER SPRING M3 2
8 24-11113 BEARING MF106ZZS 2
9 26-E26601 (WT) FLAT IDLER (OD 20, W8) 1
10 26-E26602 (WT) IDLER PULLEY SHAFT 1
11 26-E26603 (WT) BEARING SPACER (OD7, ID6, W1) 1
12 26-E89096 (WT) TENSIONING MNT 1
Assembly View
1
2
3
4
5
6
7
8
9
10
11
12