ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第158页
(WT83) WAFER TABL E 12-4 3 01-E04228 (WT83) WAFER EXPANDER H ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTO MER SERVIC E DRA WIN G ASM CUSTOMER SE RVICE DRAWING ASM CUST OMER SERVICE D RAWING AS…
(WT83) WAFER TABLE
12-3
2 01-E04227 (WT83) WAFER TABLE X-BASE E
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER TABLE X-BASE
01-E04227
CS-01-E04227
11
FROM: 01-E04227_E_2011.02.07
E1
E
ITEM PART NO. DESCRIPTION QTY.
1 01-20333 (WT) X LINEAR MOTOR (MECH.) 1
2 01-60545 (WT) X HARD STOPPER ASSY 2
3 02-66577 (WT) LINDA X MTR COIL ASSY. 1
4 02-74483 (WT83) X HOME SNR 1
5 02-E00160 (WT83) Y ENCODER ASSY 1
6 24-00305 LM GUIDE LWES15C2R760SLT1P/W2YCG 1
7 26-E22128 (WT) STOPPER 1
8 26-E89415 (WT) Y ENCODER MOUNT 1
9 26-E89416 (WT) Y HOME FLAG 1
10 26-E90948 (WT) X TABLE BASE 1
11 26-F45907 (WT) LINEAR MOTOR COVER 1
12 26-F45908 (WT) LINEAR MOTOR COVER SPACER 1
13 53-70023 RGS-S SCALE (SELF-ADHESIVE) 1
Assembly View
6
10
7
8
9
4
5
A
DETAIL A
B
DETAIL B
13
1
11
12
3
2
(WT83) WAFER TABLE
12-3
2 01-E04227 (WT83) WAFER TABLE X-BASE E
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER TABLE X-BASE
01-E04227
CS-01-E04227
11
FROM: 01-E04227_E_2011.02.07
E1
E
ITEM PART NO. DESCRIPTION QTY.
1 01-20333 (WT) X LINEAR MOTOR (MECH.) 1
2 01-60545 (WT) X HARD STOPPER ASSY 2
3 02-66577 (WT) LINDA X MTR COIL ASSY. 1
4 02-74483 (WT83) X HOME SNR 1
5 02-E00160 (WT83) Y ENCODER ASSY 1
6 24-00305 LM GUIDE LWES15C2R760SLT1P/W2YCG 1
7 26-E22128 (WT) STOPPER 1
8 26-E89415 (WT) Y ENCODER MOUNT 1
9 26-E89416 (WT) Y HOME FLAG 1
10 26-E90948 (WT) X TABLE BASE 1
11 26-F45907 (WT) LINEAR MOTOR COVER 1
12 26-F45908 (WT) LINEAR MOTOR COVER SPACER 1
13 53-70023 RGS-S SCALE (SELF-ADHESIVE) 1
Assembly View
6
10
7
8
9
4
5
A
DETAIL A
B
DETAIL B
13
1
11
12
3
2
(WT83) WAFER TABLE
12-4
3 01-E04228 (WT83) WAFER EXPANDER H
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT83) WAFER EXPANDER
01-E04228
CS-01-E042 28
31
FROM: 01-E04228_H_2011.02.08
H1
H
ITEM PART NO. DESCRIPTION QTY.
1 01-38138 (WT) ROTATING RING FLAT IDLER ASSY 1
2 01-42255 (WT) SOLENOID MNT 1
3 01-60546 (WT) ROTATING RING & PULLEY ASSY 1
4 01-60547 (WT) INNER RING ASSY 1
5 01-60550 (WT) EXPANDER TOP PLATE ASSY 1
6 01-60552 (WT) TOP PLATE UP/DN SCREW (DRIVING) 1
7 01-60553 (WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER) 2
8 01-60554 (WT) TOP PLATE UP/DN SCREW (DRIVEN) 1
9 01-60556 (WT) TENSIONING FLAT IDLER ASSY 1
10 01-60557 (WT) ROTAING RING DRIVING SHAFT ASSY 1
11 01-60558 (WT) ROTATING RING ENCODER IDLER 1
12 01-61017 (WL) LOADER Y ARM ASSY 1
13 01-61019 (WL) Y DRIVEN ASSY 1
14 01-62979 (WT) EXPANDER INSIDE IDLER ASSY 1
15 01-64703 (WT) RING ROTATE TENSION FLAT IDLER ASSY 1
16 01-E04232 (WT83) RING LOCK ASSY 1
17 01-E04233 (WT83) EXPANDER DRIVING ASSY 1
18 01-E04234 (WT83) EXPANDER ROTATION DRIVING ASSY 1
19 01-E04235 (WT83) INNER RING UP/DN CHECK SNR ASSY 1
20 01-E04236 (WT83) TOP PLATE UP/DN SNR ASSY 1
21 01-E04237 (WT83) RING LOCK SOL ASSY 1
22 01-E04238 (WL83) LOADER CLAMP SOL ASSY 1
23 01-E04239 (WL83) LOADER CLAMP ASSY 1
24 01-E04240 (WL83) Y DRIVING ASSY 1
25 01-E07279 (WT) NEW BUMPER ASSY 1
26 01-E11009 (WT) ROTATING RING V BEARING, FIX 2
27 01-E11010 (WT) ROTATING RING V BEARING, ADJ 5
28 02-74494 (WT83) ROTATING RING ENC ASSY 1
29 02-74495 (WT83) ROTATING RING HOME SNR 1
30 02-74496 (WT83) FRONT SAFETY SNR ASSY 1
31 02-E00159 (WT83) X ENCODER CABLE ASSY 1
32 23-40017 DOWEL PIN D4 X L15 4
33 23-40043 DOWEL PIN D3 X L10, SST 2
34 24-00729 LM GUIDE MHD10C2R625SLT1H/U 1
35 26-52221 CONNECTOR MOUNT 2
36 26-E51681 (WT) TABLE LOCK, RIGHT 1
ITEM PART NO. DESCRIPTION QTY.
37 26-E88719 (WT) XY DISK MNT 1
38 26-E88720 (WT) X HOME FLAG 1
39 26-E88721 (WT) X ENCODER MOUNT 1
40 26-E88722 (WT) COVER, FRONT 1
41 26-E88723 (WT) COVER, LEFT 1
42 26-E88724 (WT) COVER, RIGHT 1
43 26-E88725 (WT) COVER, BACK 1
44 26-E94527 (WT) WE-12, INNER RING (NORMAL) 1
45 26-F36076 (WT) COVER SPACER 8
46 26-F54327 (WE) SPRING BUSHING 2
47 73-00389 TIMING BELT 4T2.5/5000M 1
48 73-00409 TIMING BELT 1386-3GT-6 1
49 73-00630 TIMING BELT A6R25M389150 1
50 73-13041 TIMING BELT A6R23M084060 1
51 75-10227 COMPRESSION SPRING LC-024C-6 2
Assembly View
NOTE:The exploded view are on the page 12-5 and 12-6
(WT83) WAFER TABLE
12-5
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWIN G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAW INGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER S ERVICE DRAW INGASM CUSTOMER SERVICE DRAW ING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER S ERVICE DRAW INGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAW ING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWIN G ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER S ERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO .
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRA WING CONTAINS PROPRIETARY
ALL CA PA CITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
A ssembl y A uto ma t i o n Ltd .
A S M
DWG REV
(WT83) WAFER EXPANDER
01-E04228
CS-01-E04228
32
FROM: 01-E04228_H_2011.02.08
H1
H
37
41
42
43
44
48
49
50
1
3
5
10
27
16
17
20
28
39
A
DETAIL A
B
DETAIL B
D
DETAIL D
31
E
DETAIL E
2
22
21
38
F
DETAIL F
32
H
DETAIL H
I
DETAIL I
K
DETAIL K
35
15
L
DETAIL L
19
14
29
26
9
18
C
DETAIL C
11
G
DETAIL G
6
J
DETAIL J
33
4
7
8
40
46
51
45
30
25
36
ＮＯＴＥ：Ｔｈｅ ｐａｒｔ ｔａｂｌｅ ｉｓ ｏｎ ｔｈｅ ｐａｇｅ １２－４
问题１：３＃是如何实现旋转导向的？
用大的回转支承轴承？
问题２：旋转过程中，４＃上下运
动，它是如何实现Ｚ向导向而不旋
转的？
上升到到位的时候
问题３：有时候４＃只旋转不升降，
这又是如何切换的？
问题４：４４＃放在４＃上是通过磁铁吸附？那
么它是如何与４＃定位的呢？
问题５：这个气缸的
具体作用是什么？