ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第184页
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13-1
Section 13 01-E04293 (WB83) WAFER BLOWER A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
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B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WB83) WAFER BLOWER
01-E04293
CS-01-E04293
11
FROM: 01-E04293_A_2010.01.26
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 02-74534 (WB83) BLOWER ELEC ASSY 1
2 26-F16042 BLOWER CLAMP (L90) 1
3 26-F27321 (WB) AIR DUCT MOUNT 1
4 26-F30945 (WB) AIR DUCT 1
Assembly View
1
2
3
4
SECTION 14
Part No Description Rev Page
01-E04299 (PS83) PNEUMATIC MAINTENANCE UNIT K 14-1