ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第165页
(WT83) WAFER TABL E 12-11 3.3.2 01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY E ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTOMER SERVICE DRAWING ASM C USTOMER SERVI CE DRA WING ASM CUS…
(WT83) WAFER TABLE
12-10
3.3.1 01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY F
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) 12" WAFER GUIDE, TOP RING LEFT ASSY
01-60563
CS-01-60563
11
FROM: 01-60563_F_2011.02.08
F1
F
ITEM PART NO. DESCRIPTION QTY.
1 01-E06515 (WE) 12'' WAFER SPRING STOPPER LEFT 1
2 23-40043 DOWEL PIN D3 X L10, SST 3
3 26-E88743 (WT) FF, END STOPPER 1
4 26-F09311 (WT) WE-12, WAFER GUIDE, TOP RING, LEFT 1
5 26-F09313 (WT) CONNECTOR SHAFT 1
6 26-F38750 (WE) 12'' WAFER STOPPER SPRING CLAMPER 1
Assembly View
2
3
4
5
6
1
(WT83) WAFER TABLE
12-11
3.3.2 01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY E
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY
01-60564
CS-01-60564
11
FROM: 01-60564_E_2011.02.08
E1
E
ITEM PART NO. DESCRIPTION QTY.
1 01-E06514 (WE) 12'' WAFER SPRING STOPPER RIGHT 1
2 20-60472 SOC HD CAP SCREW M3 X 6 1
3 23-40043 DOWEL PIN D3 X L10, SST 3
4 26-E88743 (WT) FF, END STOPPER 1
5 26-E88744 (WT) WE-12, WAFER GUIDE, RIGHT, TOP RING 1
6 26-F38750 (WE) 12'' WAFER STOPPER SPRING CLAMPER 1
Assembly View
2
3
4
5
6
1
Ａ和Ｂ合起来使得每次ｗａｆｅｒ都停在一个相对
恒定的位置，同时消除了扩晶过程中的左
右晃动。
(WT83) WAFER TABLE
12-12
3.4 01-60552 (WT) TOP PLATE UP/DN SCREW (DRIVING) J
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT) TOP PLATE UP/DN SCREW (DRIVING)
01-60552
CS-01-60552
11
FROM: 01-60552_J_2011.02.08
J1
J
ITEM PART NO. DESCRIPTION QTY.
1 01-E09012 (WT) DRIVING SCREW, TOP PLATE 1
2 23-60014 PARALLEL KEY B2 X H2 X L10 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E26585 (WT) END WASHER 1
5 26-E26586 (WT) SET COLLAR D8 1
6 26-E74128 PARALLEL KEY H2 X L6 1
7 26-E89091 (WT) A/C BEARING COVER FOR LS 1
8 26-F00931 (WT) MITER GEAR, DRIVEN 1
9 26-F04302 (WT) LEADSCREW LOCK PLATE 1
10 26-F33801 (WT) TIMING BELT PULLEY (HTD 5,16T,W16) 1
11 26-F34927 (WT) NUT STOPPER FOR LEADSCREW 2
12 26-F34928 (WT) LOCKING NUT 2
13 26-F34973 (WT) BEARING SPACER (OD10, ID6, W2) 1
14 26-F34974 (WH) BEARING SPACER 1
Assembly View
2
3
4
5
6
7
8
9
10
12
13
14
1
11