ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第152页

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(EJ83) DIE EJECTOR

11-11

Pneumatic System For (Ej83) Die Ejector

SECTION 12

Part No Description Rev Page

01-E04281 (WT83) WAFER TABLE F 12-1

01-E04226 (WT83) WAFER TABLE Y-BASE D 12-2

01-E04227 (WT83) WAFER TABLE X-BASE E 12-3

01-E04228 (WT83) WAFER EXPANDER H 12-4

01-60546 (WT) ROTATING RING & PULLEY ASSY A 12-7

01-60547 (WT) INNER RING ASSY D 12-8

01-60550 (WT) EXPANDER TOP PLATE ASSY I 12-9

01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY F 12-10

01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY E 12-11

01-60552 (WT) TOP PLATE UP/DN SCREW (DRIVING) J 12-12

01-60553 (WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER) I 12-13

01-60554 (WT) TOP PLATE UP/DN SCREW (DRIVEN) J 12-14

01-60557 (WT) ROTAING RING DRIVING SHAFT ASSY A 12-15

01-60558 (WT) ROTATING RING ENCODER IDLER B 12-16

01-62979 (WT) EXPANDER INSIDE IDLER ASSY A 12-17

01-64703 (WT) RING ROTATE TENSION FLAT IDLER ASSY A 12-18

01-E04223 (WT83) EXPANDER DRIVING ASSY A 12-19