ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第172页
(WT83) WAFER TABL E 12-18 3.10 01-64703 (WT) RING ROTATE TENSION FLAT IDLER ASSY A ASM CUST OMER SERV ICE D RAWING ASM C USTOMER SERV ICE DRAWIN G ASM CUSTOM ER SERV ICE DRAW IN G ASM CUSTOMER SERV ICE DRA WIN G ASM CUST…

(WT83) WAFER TABLE
12-17
3.9 01-62979 (WT) EXPANDER INSIDE IDLER ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) EXPANDER INSIDE IDLER ASSY
01-62979
CS-01-62979
11
FROM: 01-62979_A_2010.10.14
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 19-00009 RETAINING RING FOR SHAFT 6MM STWS6 1
2 21-60004 SELF LOCKING NUT M4 1
3 24-11113 BEARING MF106ZZS 2
4 26-E26603 (WT) BEARING SPACER (OD7, ID6, W1) 1
5 26-E26648 (WT) IDLER MNT 1
6 26-E97075 (WT) IDLER PULLEY SHAFT 1
7 26-F33802 (WT) TIMING BELT IDLER (HTD 5,16T,W16) 1
Assembly View
1
2
3
4
5
6
7

(WT83) WAFER TABLE
12-18
3.10 01-64703 (WT) RING ROTATE TENSION FLAT IDLER ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT) RING ROTATE TENSION FLAT IDLER ASSY
01-64703
CS-01-64703
11
FROM: 01-64703_A_2010.10.14
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 19-00009 RETAINING RING FOR SHAFT 6MM STWS6 1
2 20-60476 SOC HD CAP SCREW M3 X 10 2
3 20-70519 SOC SET CUP SCREW M4 X 14 1
4 21-60004 SELF LOCKING NUT M4 1
5 22-20003 WASHER FLAT M3 2
6 22-20004 WASHER FLAT M4 1
7 22-20103 WASHER SPRING M3 2
8 24-11113 BEARING MF106ZZS 2
9 26-E26601 (WT) FLAT IDLER (OD 20, W8) 1
10 26-E26602 (WT) IDLER PULLEY SHAFT 1
11 26-E26603 (WT) BEARING SPACER (OD7, ID6, W1) 1
12 26-E89096 (WT) TENSIONING MNT 1
Assembly View
1
2
3
4
5
6
7
8
9
10
11
12

(WT83) WAFER TABLE
12-19
3.11 01-E04223 (WT83) EXPANDER DRIVING ASSY A
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT83) EXPANDER DRIVING ASSY
01-E04233
CS-01-E042 33
11
FROM: 01-E04233_A_2010.10.14
A1
A
ITEM PART NO. DESCRIPTION QTY.
1 02-74486 (WT83) EXPANDER DRIVE DCM + ENC ASSY 1
2 20-60472 SOC HD CAP SCREW M3 X 6 4
3 20-70512 SOC SET SCREW(DOG POINT) M4X8 BLACK 1
4 20-75509 SOC SET SILVER GRIP SCREW M4 X 4 1
5 26-E89102 (WT) EXPANDER DC MOTOR MNT 1
6 26-F00932 (WT) MITER GEAR, DRIVING 1
Assembly View
2
3
4
5
6
1