ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第177页
(WT83) WAFER TABL E 12-23 7 01-E04240 (WL83) Y DRIVING ASSY B ASM CUSTOM ER SERVICE D RAWING ASM C UST OMER S ERV ICE D RAWIN G ASM CUSTOM ER SERVICE DRAW ING ASM CUST OM ER S ERV ICE D RAW IN G AS M CU STOMER S ERV ICE …
(WT83) WAFER TABLE
12-22
6 01-E04239 (WL83) LOADER CLAMP ASSY B
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WL83) LOADER CLAMP ASSY
01-E04239
CS-01-E042 39
11
FROM: 01-E04239_B_2010.10.15
B1
B
ITEM PART NO. DESCRIPTION QTY.
1 02-74498 (WL83) WAFER EXIST SNR & CABLE ASSY 1
2 23-40043 DOWEL PIN D3 X L10, SST 2
3 24-11020-1 FLANGE BEARING 2X5X2.3 F682ZZ 4
4 26-57459 (WH) MA, FIX CLAMP MEMBRANE 2
5 26-E24142 (WL) PIVOT SPACER 4
6 26-E24143 (WL) PIVOT SHAFT 2
7 26-E24144 (WL) SEALING COVER 2
8 26-E24145 (WL) PLUNGER 2
9 26-E24147 (WL) FLAG, GUIDING BLOCK 3
10 26-E24152 (WL) GUIDING BLOCK COVER 1
11 26-E24153 (WL) WAFER EXIST SPRING ROD 1
12 26-E90760 (WL) HOOK BODY 1
13 26-E90761 (WL) HOOK BODY COVER - LOWER 1
14 26-E90762 (WL) HOOK BODY COVER - UPPER 1
15 26-E90763 (WL) FLAG, GUIDING BLOCK (B) 1
16 26-E90764 (WL) HOOK - LOWER 1
17 26-E90765 (WL) HOOK - UPPER 1
18 26-E90766 (WL) WAFER EXIST FLAG 1
19 31-40469 BARB FITTING M-3AU-3 2
20 75-20071 EXTENSION SPRING SSE-007A-5 1
21 875-20019 COMPRESSION SPRING D10720 2
Assembly View
2
3
4
5
6
7
8
9
10
12
13
14
15
16
17
18
19
21
1
A
DETAIL A
11
20
(WT83) WAFER TABLE
12-23
7 01-E04240 (WL83) Y DRIVING ASSY B
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAW INGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAW INGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DW G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRA WING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WL83) Y DRIVING ASSY
01-E04240
CS-01-E04240
11
FROM: 01-E04240_B_2010.10.15
B1
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E12171 (WL) IDLER PULLEY ASSY 1
2 02-74499 (WL83) Y HOME SENSOR ASSY 1
3 02-74500 (WL83) Y DRIVING MOTOR ASSY 1
4 26-E19450 (EJ) SET COLLAR D10 1
5 26-E26482 (WL) DRIVING PULLEY (T2.5, 21T, W4) 1
6 26-E90758 (WL) Y MOTOR MNT 1
Assembly View
4
5
6
1
2
3
(WT83) WAFER TABLE
12-24
Module Sensors / Encoders Location For (Wt83) Wafer Table
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER TABLE
01-E04281
CS-01-E04281
11
FROM: 01-E04281_F_2011.02.08
F1
F
Y Home Sensor
Rotating Ting Home Sensor
Front Safety Sensor
X Encoder
X Home Sensor
Y Encoder
Y Home Sensor
Inner Ring Upper/Down Check Sensor
Top Plate Upper/Down Limit Sensor
02-74496
02-74484
02-74497
02-74495
02-74491
Wafer Exist Sensor
02-74499
02-74483
02-74482
02-74490
53-40238-1S
53-40238-1S
Wafer Exist Sensor