ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第163页
(WT83) WAFER TABL E 12-9 3.3 01-60550 (WT) EXPANDER TOP PLATE ASSY I ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTO MER SERVIC E DRA WIN G ASM CUSTOMER SE RVICE DRAWING ASM CUST OMER SERVICE D R…
(WT83) WAFER TABLE
12-8
3.2 01-60547 (WT) INNER RING ASSY D
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) INNER RING ASSY
01-60547
CS-01-60547
11
FROM: 01-60547_D_2011.02.07
D1
D
ITEM PART NO. DESCRIPTION QTY.
1 00-00274 DISC MAGNET 2 10
2 01-67480 (WT) WE TOP PLATE CONNECTOR ASSY. 1
3 23-00037 DOWEL PIN D5 X L20 1
4 24-13014 LINEAR BUSHING LM4M 6
5 26-E38335 (WT) LM BUSH COVER 3
6 26-E38337 (WT) PRELOAD PLATE SHAFT 6
7 26-E88727 (WT) WE, INNER RING 1
8 26-E88728 (WT) WE, RAIL FOR LOCK 2
9 26-F55230 (WT) INNER RING PRELOAD PLATE 3
10 820-10030 SOCKET BOTTON HEAD SCREW M3X8 4
11 875-20112 COMPRESSION SPRING D11260 6
Assembly View
4
5
9
6
8
10
11
3
7
2
1
问题６：
这一组预压机构是的９＃可以上下浮动？
它的作用是什么？
问题７：
２＃的具体作用是什么？感觉
少了零件？
(WT83) WAFER TABLE
12-9
3.3 01-60550 (WT) EXPANDER TOP PLATE ASSY I
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) EXPANDER TOP PLATE ASSY
01-60550
CS-01-60550
11
FROM: 01-60550_I_2011.02.07
I1
I
ITEM PART NO. DESCRIPTION QTY.
1 01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY 1
2 01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY 1
3 01-E08639 (WT) TOP RING V BEARING, FIX 2
4 01-E11008 (WT) TOP RING V BEARING, ADJ 2
5 23-40043 DOWEL PIN D3 X L10, SST 2
6 26-E88735 (WT) TOP PLATE 1
7 26-E88737 (WT) 12INCH I/O GUIDE, RIGHT 1
8 26-E88738 (WT) 12INCH I/O GUIDE, LEFT 1
9 26-E88739 (WT) FLAG FOR UP/DONW HOME & LIMIT 1
10 26-F09315 (WT) TOP ROTARY RING 1
11 26-F35176 (WT) 8 INCH WAFER ORIENTATION PIN 2
Assembly View
5
6
7
8
9
10
1
2
3
4
11
一个Ｐｉｎ就够
了
８＇＇ ｋｉｔ 挡边
(WT83) WAFER TABLE
12-10
3.3.1 01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY F
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) 12" WAFER GUIDE, TOP RING LEFT ASSY
01-60563
CS-01-60563
11
FROM: 01-60563_F_2011.02.08
F1
F
ITEM PART NO. DESCRIPTION QTY.
1 01-E06515 (WE) 12'' WAFER SPRING STOPPER LEFT 1
2 23-40043 DOWEL PIN D3 X L10, SST 3
3 26-E88743 (WT) FF, END STOPPER 1
4 26-F09311 (WT) WE-12, WAFER GUIDE, TOP RING, LEFT 1
5 26-F09313 (WT) CONNECTOR SHAFT 1
6 26-F38750 (WE) 12'' WAFER STOPPER SPRING CLAMPER 1
Assembly View
2
3
4
5
6
1