ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第167页
(WT83) WAFER TABL E 12-13 3.5 01-60553 (WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER) I ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTOMER SERVICE DRAWING ASM C USTOMER SERVI CE DRA WING ASM CUSTOMER S…
(WT83) WAFER TABLE
12-12
3.4 01-60552 (WT) TOP PLATE UP/DN SCREW (DRIVING) J
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM
CUSTOMER
SERV
ICE
DRAWIN
G
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
A
SM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT) TOP PLATE UP/DN SCREW (DRIVING)
01-60552
CS-01-60552
11
FROM: 01-60552_J_2011.02.08
J1
J
ITEM PART NO. DESCRIPTION QTY.
1 01-E09012 (WT) DRIVING SCREW, TOP PLATE 1
2 23-60014 PARALLEL KEY B2 X H2 X L10 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E26585 (WT) END WASHER 1
5 26-E26586 (WT) SET COLLAR D8 1
6 26-E74128 PARALLEL KEY H2 X L6 1
7 26-E89091 (WT) A/C BEARING COVER FOR LS 1
8 26-F00931 (WT) MITER GEAR, DRIVEN 1
9 26-F04302 (WT) LEADSCREW LOCK PLATE 1
10 26-F33801 (WT) TIMING BELT PULLEY (HTD 5,16T,W16) 1
11 26-F34927 (WT) NUT STOPPER FOR LEADSCREW 2
12 26-F34928 (WT) LOCKING NUT 2
13 26-F34973 (WT) BEARING SPACER (OD10, ID6, W2) 1
14 26-F34974 (WH) BEARING SPACER 1
Assembly View
2
3
4
5
6
7
8
9
10
12
13
14
1
11
(WT83) WAFER TABLE
12-13
3.5 01-60553 (WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER) I
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER)
01-60553
CS-01-60553
11
FROM: 01-60553_I_2010.10.08
I1
I
ITEM PART NO. DESCRIPTION QTY.
1 01-E09011 (WT) DRIVEN LEAD SCREW 1
2 23-60014 PARALLEL KEY B2 X H2 X L10 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E14906 (WH) BEARING SPACER 2
5 26-E26585 (WT) END WASHER 1
6 26-E26586 (WT) SET COLLAR D8 1
7 26-E26888 (WT) LEADSCREW NUT LOCK PLATE 1
8 26-E89091 (WT) A/C BEARING COVER FOR LS 1
9 26-F33801 (WT) TIMING BELT PULLEY (HTD 5,16T,W16) 1
10 26-F34927 (WT) NUT STOPPER FOR LEADSCREW 2
11 26-F34928 (WT) LOCKING NUT 2
Assembly View
1
3
4
5
6
7
8
9
10
11
2
(WT83) WAFER TABLE
12-14
3.6 01-60554 (WT) TOP PLATE UP/DN SCREW (DRIVEN) J
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) TOP PLATE UP/DN SCREW (DRIVEN)
01-60554
CS-01-60554
11
FROM: 01-60554_J_2010.10.08
J1
J
ITEM PART NO. DESCRIPTION QTY.
1 01-E09011 (WT) DRIVEN LEAD SCREW 1
2 23-60014 PARALLEL KEY B2 X H2 X L10 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E14906 (WH) BEARING SPACER 2
5 26-E26585 (WT) END WASHER 1
6 26-E26586 (WT) SET COLLAR D8 1
7 26-E26888 (WT) LEADSCREW NUT LOCK PLATE 1
8 26-E89091 (WT) A/C BEARING COVER FOR LS 1
9 26-F34927 (WT) NUT STOPPER FOR LEADSCREW 2
10 26-F34928 (WT) LOCKING NUT 2
Assembly View
3
4
5
6
7
8
9
10
1
2
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