ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第164页
(WT83) WAFER TABL E 12-10 3.3.1 01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY F ASM CUSTOMER SERVICE DRA WING ASM CUST OMER SERV IC E DRAWI NG ASM CUSTO MER SERVIC E DRA WIN G ASM CUSTOMER SE RVICE DRAWING ASM C…
(WT83) WAFER TABLE
12-9
3.3 01-60550 (WT) EXPANDER TOP PLATE ASSY I
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) EXPANDER TOP PLATE ASSY
01-60550
CS-01-60550
11
FROM: 01-60550_I_2011.02.07
I1
I
ITEM PART NO. DESCRIPTION QTY.
1 01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY 1
2 01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY 1
3 01-E08639 (WT) TOP RING V BEARING, FIX 2
4 01-E11008 (WT) TOP RING V BEARING, ADJ 2
5 23-40043 DOWEL PIN D3 X L10, SST 2
6 26-E88735 (WT) TOP PLATE 1
7 26-E88737 (WT) 12INCH I/O GUIDE, RIGHT 1
8 26-E88738 (WT) 12INCH I/O GUIDE, LEFT 1
9 26-E88739 (WT) FLAG FOR UP/DONW HOME & LIMIT 1
10 26-F09315 (WT) TOP ROTARY RING 1
11 26-F35176 (WT) 8 INCH WAFER ORIENTATION PIN 2
Assembly View
5
6
7
8
9
10
1
2
3
4
11
一个Ｐｉｎ就够
了
８＇＇ ｋｉｔ 挡边
(WT83) WAFER TABLE
12-10
3.3.1 01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY F
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESISTORS AR E IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) 12" WAFER GUIDE, TOP RING LEFT ASSY
01-60563
CS-01-60563
11
FROM: 01-60563_F_2011.02.08
F1
F
ITEM PART NO. DESCRIPTION QTY.
1 01-E06515 (WE) 12'' WAFER SPRING STOPPER LEFT 1
2 23-40043 DOWEL PIN D3 X L10, SST 3
3 26-E88743 (WT) FF, END STOPPER 1
4 26-F09311 (WT) WE-12, WAFER GUIDE, TOP RING, LEFT 1
5 26-F09313 (WT) CONNECTOR SHAFT 1
6 26-F38750 (WE) 12'' WAFER STOPPER SPRING CLAMPER 1
Assembly View
2
3
4
5
6
1
(WT83) WAFER TABLE
12-11
3.3.2 01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY E
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ
F
ALL RESI STORS ARE IN
Ω
ALL DIM ARE
IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG RE V
(WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY
01-60564
CS-01-60564
11
FROM: 01-60564_E_2011.02.08
E1
E
ITEM PART NO. DESCRIPTION QTY.
1 01-E06514 (WE) 12'' WAFER SPRING STOPPER RIGHT 1
2 20-60472 SOC HD CAP SCREW M3 X 6 1
3 23-40043 DOWEL PIN D3 X L10, SST 3
4 26-E88743 (WT) FF, END STOPPER 1
5 26-E88744 (WT) WE-12, WAFER GUIDE, RIGHT, TOP RING 1
6 26-F38750 (WE) 12'' WAFER STOPPER SPRING CLAMPER 1
Assembly View
2
3
4
5
6
1
Ａ和Ｂ合起来使得每次ｗａｆｅｒ都停在一个相对
恒定的位置，同时消除了扩晶过程中的左
右晃动。