ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第131页

SECTION 10 Part No Description Rev Page 01-E04282 (WC83) WAFER CASSETTE ELEVATOR C 10-1 01-60804 (WC) Z- TRANSPORTER H 10-2 01-60805 (WC) CASSETTE PLATFORM B 10-3 01-E07163 (WC) SAFETY GUARD ASSY B 10-4

SECTION 10

Part No Description Rev Page

01-E04282 (WC83) WAFER CASSETTE ELEVATOR C 10-1

01-60804 (WC) Z- TRANSPORTER H 10-2

01-60805 (WC) CASSETTE PLATFORM B 10-3

01-E07163 (WC) SAFETY GUARD ASSY B 10-4