ASMPT AD8312 Mech & Elec Drawing Album.pdf - 第154页
01-61017 (WL) LOADER Y ARM ASSY F 12-20 01-61019 (WL) Y DRIVEN ASSY B 12-21 01-E04239 (WL83) LOADER CLAMP ASSY B 12-22 01-E04240 (WL83) Y DRIVING ASSY B 12-23
SECTION 12
Part No Description Rev Page
01-E04281 (WT83) WAFER TABLE F 12-1
01-E04226 (WT83) WAFER TABLE Y-BASE D 12-2
01-E04227 (WT83) WAFER TABLE X-BASE E 12-3
01-E04228 (WT83) WAFER EXPANDER H 12-4
01-60546 (WT) ROTATING RING & PULLEY ASSY A 12-7
01-60547 (WT) INNER RING ASSY D 12-8
01-60550 (WT) EXPANDER TOP PLATE ASSY I 12-9
01-60563 (WT) 12" WAFER GUIDE, TOP RING LEFT ASSY F 12-10
01-60564 (WT) 12" WAFER GUIDE, TOPRING RIGHT ASSY E 12-11
01-60552 (WT) TOP PLATE UP/DN SCREW (DRIVING) J 12-12
01-60553 (WT) TOPPLATE UP/DN SCW (DRIVEN/STOPPER) I 12-13
01-60554 (WT) TOP PLATE UP/DN SCREW (DRIVEN) J 12-14
01-60557 (WT) ROTAING RING DRIVING SHAFT ASSY A 12-15
01-60558 (WT) ROTATING RING ENCODER IDLER B 12-16
01-62979 (WT) EXPANDER INSIDE IDLER ASSY A 12-17
01-64703 (WT) RING ROTATE TENSION FLAT IDLER ASSY A 12-18
01-E04223 (WT83) EXPANDER DRIVING ASSY A 12-19
01-61017 (WL) LOADER Y ARM ASSY F 12-20
01-61019 (WL) Y DRIVEN ASSY B 12-21
01-E04239 (WL83) LOADER CLAMP ASSY B 12-22
01-E04240 (WL83) Y DRIVING ASSY B 12-23
12-1
Section 12 01-E04281 (WT83) WAFER TABLE F
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERV ICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 345678
87654312
B
A
C
D
E
F F
E
D
C
A
B
CS D W G NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN
µ F
ALL RESISTORS ARE IN
Ω
ALL DIM A
RE IN mm
UNLESS OTHERWISE SPECIFIED
ASM
Assembly Automation Ltd.
A S M
DWG REV
(WT83) WAFER TABLE
01-E04281
CS-01-E04281
11
FROM: 01-E04281_F_2011.02.08
F1
F
ITEM PART NO. DESCRIPTION QTY.
1 01-E04226 (WT83) WAFER TABLE Y-BASE 1
2 01-E04227 (WT83) WAFER TABLE X-BASE 1
3 01-E04228 (WT83) WAFER EXPANDER 1
Assembly View
1
3
NOTE: For the assembly positions of 01-61017,01-61019, 01-E04239,
01-E04240 ,24-00729 73-00389 , Please refer to 01-E04228 .
2