TRS Advanced WB Intel Issue 02.pdf - 第124页
TRS Advanced Maintenance 124 Issue 2, Nov 14 Objective 41: Complete Board Stop Setup as per Product Changeover Procedure in the EX Technical Reference Manual
Issue 2, Nov 14
TRS Advanced Maintenance
123
Objective 40: Check TRP Gap and Adjust
The TRP gap should only be checked and adjusted if it is found that either all substrates are
above the Active Surround and not being clamped, or the substrates are below the level of
the Active Surround. This substrate height should be checked.
Adjust the level of TRP using a “Technical Reference Manual” TRS Chapter.
TRS Advanced Maintenance
124
Issue 2, Nov 14
Objective 41: Complete Board Stop Setup as per Product Changeover Procedure in the
EX Technical Reference Manual
Issue 2, Nov 14
TRS Advanced Maintenance
125
Objective 42: Baseline Data Information
Reference information: Both the machine serial number and tooling image number is
identifiable in the ASM Merlin Database.
Machine Critical Information
- Rail to Chase cap co-planarity: Record TB384 measurements.
Reading1 Reading2 Reading3
A
B
C
D
- Vacuum Base Capability: With the RAJ fitted and the vacuum flow open toggle the
vacuum on and note the systems total pressure.
Totalvacuumpressure
- Rail Speeds: Complete rail speed calibration for center rails and auxiliary rails and
record values.
Pre Set-up Checks
- Before set-up please confirm that you have access to fresh tray and substrates
- Each substrate must have die attached and preferably un-broken
- Please measure each substrate dimensions X, Y, Z, checking for consistency