OM-1271-003_w.pdf - 第44页
41 Tg1097-ID-OP 0708-002 1 1.3 Inspection, Cleaning, and Lubrication Spots 1 1.3.3 Placement Head Linear Guides (3 places) Every 3 Months Lubrication (DAPHNE EPONEX GREASE No. 1) Apply new grease using a syringe. Lubrica…

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Tg1097-ID-OP
0708-002
11.3 Inspection, Cleaning, and Lubrication Spots
11.3.2 Vacuum Nozzle
Inside the Vacuum Nozzle
Every Month Cleaning
Blow air into the vacuum hole.
Vacuum Nozzle Hole
Every Month Cleaning
Blow air into the vacuum hole.
Vacuum Nozzle End
Every Month Cleaning
Clean it with a rag.
Diffusion Plate
Upper Surface of Diffusion Plate
Every Week Inspection/Cleaning
Check that no dirt and dust adheres to the �
upper surface of the diffusion plate.
If necessary, wipe them off with the lens
cleaning cloth.
Never use neither solvent nor �
ethanol.
Otherwise, the diffusion plate �
may crack.
Lower Surface of Diffusion Plate
Every Week Cleaning
When dirt and dust have accumulated on �
the lower surface of the diffusion plate, �
wipe them off with the lens cleaning cloth.
Never use neither solvent nor �
ethanol.
Otherwise, the diffusion plate �
may crack.
Notice
Notice
Fig. 15 Vacuum Nozzle

41
Tg1097-ID-OP
0708-002
11.3 Inspection, Cleaning, and Lubrication Spots
11.3.3 Placement Head
Linear Guides (3 places)
Every 3 Months Lubrication
(DAPHNE EPONEX GREASE No. 1)
Apply new grease using a syringe.
Lubrication should be applied every 3
months after the initial month.
The nozzle to be used is the nozzle
No. 19 (brown).
Take care so that any grease
is not attached on the sensor
when apply grease.
Saucer (3 places)
Every 3 Months Cleaning
No.19
Ball Screw
Every 3 Months Lubrication
(DAPHNE EPONEX GREASE No. 1)
Apply new grease using a syringe.
Lubrication should be applied every 3 months
after the initial month.
The nozzle to be used is the nozzle
No. 19 (brown).
No.19
Sensor
Notice
Note
Note
Wipe off old grease with an oiled rag.
Fig. 16 Placement Head

42
Tg1097-ID-OP
0708-002
Vacuum Filter
Every Month Inspection
Remove the vacuum filter using the vacuum
filter replacing jig (attached) and check the
dirt. If the vacuum filter is extremely dirty,
replace it with new one.
Refer to "12. Replacement
Procedure of Vacuum Filter" for
details.
Reference
Fig. 17
11.3 Inspection, Cleaning, and Lubrication Spots