OM-1271-003_w.pdf - 第52页
49 Tg1097-ID-OP UA54 ILB-OUT (Multi-Functional Head) 0708 - 002 UA54 ILB-OUT (Multi-Functional Head) -U16 ILB OUT 1 2 2 1 2 1 2 1 1 2 1 2 1 2 2 1 -X1637 -X1638 -X1639 -X1640 -X1641 -X1642 -X1643 -X1644 -952 -953 -956 -95…
48
Tg1097-ID-OP
15. Electrical Circuit Diagram
0708-002
15. Electrical Circuit Diagram
UA54 ILB-IN 1 (Multi-Functional Head)
/RX
RX
/TX
TX
FG
-X1607
-X1605
-X1606
-X1608
-X1609
-X1610
-U16
CN5
CN6
CN7
CN8
CN9
CN10
CN11
CN12
-922
-923
-921
-926
-925
-924
9
3 72
67
9 63
2
FG
TX
/TX
RX
/RX
-X1604-X1603
CN4CN3
10B
24B1L/R
ILB
IN
1
2
3
3
2
1
3
2
1
3
2
1
1
2
3
1
2
3
1
2
3
3
2
1
1
2
CN2
-X1602
-932
-933
-934
-930
-931
-929
CN20
CN19
CN18
CN17
CN16
CN15
CN14
CN13
-X1615
-X1614
-X1613
-X1618
-X1617
-X1616
1
2
3
3
2
1
3
2
1
3
2
1
1
2
3
1
2
3
1
2
3
3
2
1
(UA54)
:7
:2
:5
:4
:9
:2
:6
:3
:7
:3
X10520A/C
:1
:2
:4
:3
:6
:5
<Robot Cable>
<Robot Cable>
X30520A/C
:1
:2
:4
:3
:6
:5
:2
-927
-928
XB11611A/C
:1
:3
:5
XB11611A/C
:4
:6
-X1611
-X1612
X10520B/D
:1
:2
:4
:3
:6
:5
X30520B/D
:1
:2
:4
:3
:6
:5
:2
-935
-936
XB11611B/D
:1
:3
:5
XB11611B/D
:4
:6
M(A/C) M(B/D)
(OPTION)
(OPTION)
(OPTION)
(OPTION)
-X0710(CN10)
-X0502(CN4)
-U05(UA54)ILB
-U07(UA53)I/F
Front Head
Excessive
Press-in Detection 3
Front Head
Excessive
Press-in Detection 2
Front Head
Excessive
Press-in Detection 1
Front Head
Nozzle 3 Pass Line
Rear Head
Excessive
Press-in Detection 3
Rear Head
Excessive
Press-in Detection 2
Rear Head
Excessive
Press-in Detection 1
Rear Head
Nozzle 3 Pass Line
Front Head
Disengaged Nozzle
Stocker Detection 1
Front Head
Disengaged Nozzle
Stocker Detection 2
Rear Head
Disengaged Nozzle
Stocker Detection 1
Rear Head
Disengaged Nozzle
Stocker Detection 2
Rear Head
Nozzle 2 Pass Line
Rear Head
Nozzle 1 Pass Line
Front Head
Nozzle 1 Pass Line
Front Head
Nozzle 2 Pass Line
49
Tg1097-ID-OP
UA54 ILB-OUT (Multi-Functional Head)
0708-002
UA54 ILB-OUT (Multi-Functional Head)
-U16
ILB
OUT
1
2
2
1
2
1
2
1
1
2
1
2
1
2
2
1
-X1637
-X1638
-X1639
-X1640
-X1641
-X1642
-X1643
-X1644
-952
-953
-956
-957
-955
-960
-959
-958
CN37
CN38
CN39
CN40
CN41
CN42
CN43
CN44
1
2
2
1
2
1
2
1
1
2
1
2
1
2
2
1
CN51
CN50
CN49
CN48
CN47
CN46
CN53
CN52
-X1601
CN1
2
1
10B
3
4
24B2L
(UA54)
Motion Control PCB -U82
Motion Control PCB -U83
Motion Control PCB -U83
Motion Control PCB -U83
To -X8203:5
To -X8303:2
CPU2-L/R
CPU2-L/R
CPU2-L/R
CPU2-L/R
To -X8303:4
To -X8303:3
RSVOUT7
RSVOUT8
RSVOUT6
RSVOUT4
RSVOUT5
XY R STP
XY F STP
HEAD F1 STP
HEAD F2 STP
HEAD F3 STP
HEAD R3 STP
HEAD R2 STP
HEAD R1 STP
RSVOUT2
RSVOUT1
RSVOUT3
To -X8303:27
To -X8303:28
CPU2-L/R
CPU2-L/R
CPU2-L/R
CPU2-L/R
To -X8203:6
To -X8303:29
Motion Control PCB -U83
Motion Control PCB -U83
Motion Control PCB -U82
Motion Control PCB -U83
50
Tg1097-ID-OP
0708-002 -(M803WBL--A2002)
UA54 I/O Board ILB-IN 1 (L)
shows the circuit when the multi-functional head
is mounted.
When the multi-functional head is used in Stage A or B,
remove the corresponding connector to shortcut the current.
Emergency Stop Safety Monitor
Safety Monitor for Left Cover
Disengaged Suppressor
Detection (A)
Disengaged Suppressor
Detection (B)
Blue
Brown
Black
Blue
Brown
Black
(From K3 34)
(From K3 33)
Multi-Layer Tray Feeder (L)
(From K4 34)
(From K4 33)
Multi-Layer Tray Feeder (L)
BL ch1-1
-U12 (UB14)
Main Body
-X1202 (CN2)
-U16(UA54) Multi Functional Board
CB Error（A-Y1）CB Error（A-Y2）
CB Error
（B-Y1）CB Error（B-Y2） CB Error（Beam B Integral）CB Error（B-X）
CB Error
（Beam A Integral）CB Error（A-X）
From B-B3101 OUT
From A-B3101 OUT
From MA-B3103 OUT
Nozzle Up/Down
Interlock (MA)
Nozzle Up/Down
Interlock (MB)
Beam B Main Power
Breaking Detection
Beam A Main Power
Breaking Detection
Head Up/Down
Interlock (MA)
Beam B CB Error Monitor
Beam A CB Error Monitor
Note
UA54 I/O Board ILB-IN 1 (L)