5OM-1602-004_w.pdf - 第186页

5OM-1602 5-5 1 103-003J(01300-7) 侧面面板 C 1 Green/Y ellow Black Red White Black Blue Blue Blue Blue Blue Blue Black Black Black Black Black Black Black Black Black Black Black Black Black Black Black Black Black Black Blac…

5OM-1602

5-4

1103-003J(01300-6)

侧面面板 L

X10520-10

X10520-9

A21,A22,A23(R) #L11

A21,A22,A23(F) #L11

A21,A22,A23(R) #L21

A21,A22,A23(F) #L21

NOISE FILTER:Z02

Q206-1,3

Q201-1,3,5

K10-1,3,5

K28-1,3

K28-2,4

External Unit Bundled Connector (R)

External Unit Bundled Connector (F)

OP: Coplanarity Detection Power Supply

CPU 1,CPU 3 Power Supply

CPU 2 Power Supply

Black

Green/Yellow

Black

Note 4

Note 3

Note 1

Note 2

Note 1

Note 2

Note 1

Note 3

Note 4

Note 3

Note 1

Note 3

Note 1

Note 3

Note 1

Black

Blue

Brown

Grounding Green/Yellow

White

Grounding Green/Yellow

Red

Black

White

Grounding Green/Yellow

Red

Black

White

Grounding

Red

Black

Light Blue

Brown

Grounding Green/Yellow

Light Blue

5OM-1602

5-5

1103-003J(01300-7)

侧面面板 C 1

Green/Yellow

BlackRed

White

Black

Blue

Black

Blue

Red

Yellow

Red

Black

Red

White

Black

K3-34

K38-A22

U07:X27163-1

K33A-13

TB:P1

14AWG Green / Yellow

K33A-1,3,5

U07:X2723-2

TB:DC1(10A)

Vacuum Pump

G01,G02,G04,G07 Power Supply

TB:DC1(24A1)

TB:DC1(24A2)

5OM-1602

5-6

1103-003J(01300-7)

侧面面板 C 2

A21(X) Main Power:F

(L113, L213, L313)

A22(Y1) Main Power:F

(L114, L214, L314)

A23(Y2) Main Power:F

(L115, L215, L315)

HLS PCB Collective Section

A21(X) Main Power:R

(L116, L216, L316)

A22(Y1) Main Power:R

(L117, L217, L317)

A23(Y2) Main Power:R

(L118, L218, L318)

K33B-2,4,6

Red

Blue

Black

Blue

Black