5OM-1602-004_w.pdf - 第55页
5OM-1602 0910-001 1-B
5OM-1602
0910-001 1-A
第一章
气路图及实际贴装图
本章节记载了气路图及实际贴装图。
内容含有一定的难度，参考时请充分注意。
5OM-1602
0910-001 1-B
5OM-1602
1-1
气路图及实际贴装图
1103-002
装置整体 ( 气路图 )
Positioning U/D (1)
Feeder Clamp 1 Open / Close
Feeder Clamp 2 Open / Close
Positioning U/D (2)
Positioning Unit Lowering Prevention (1)
Positioning Unit Lowering Prevention (2)
Multi Layer Tray Feeder (2)
Right Side Cylinder
Left Side Cylinder
Cart Bundled Connector
Multi Layer Tray Feeder (1)
Beam Relay Panel
(Blue)
Right Side Cylinder
Left Side Cylinder
Stocker 1 U/D
Shutter 1 Open / Close
Head (1)
Nozzle1 Nozzle2 Nozzle15
Beam Relay Panel
Stocker 1 U/D
Shutter 1 Open / Close
Head (2) Head (2)
(Blue)
Robot Cable Robot Cable
Robot Cable Robot Cable
Exhaust
Hose Nipple
Setup
0.05MPa
Setup
0.35MPa
Setup
0.45MPa
Setup
0.4MPa
Movable Side Z-Clamp L
Fixed Side Z-Clamp L
PCB Stopper L
Movable Side Z-Clamp R
Fixed Side Z-Clamp R
PCB Stopper R
(Blue)