5OM-1602-004_w.pdf - 第99页
5OM-1602 2-20 传感器及负载配置图 0910-001
5OM-1602
2-19
传感器及负载配置图
1103-001
Upper Stage : Left View
Lower Stage : Right View
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
B0622
B0922
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636
Multi Function Nozzle Stocker 2 Ascending 1 Y0936 Multi Function Nozzle Stocker 1 Ascending 1
B0618 Multi Function Nozzle Stocker 2
Unit Lower Limit Detection 1
B0918 Multi Function Nozzle Stocker 1
Unit Lower Limit Detection 1
B0620 Multi Function Nozzle Stocker 2
Shutter Close Check 1
B0920 Multi Function Nozzle Stocker 1
Shutter Close Check 1
B0622
Multi Function Nozzle Stocker 2 Clamp Check 1
B0922
Multi Function Nozzle Stocker 1 Clamp Check 1
多功能吸嘴储料器部布局
5OM-1602
2-20
传感器及负载配置图
0910-001
5OM-1602
0910-001 3-A
第三章
元件配置图
本章节记载了各部的布局等。
因含有一定的难度，参考时请充分注意。