YSM10安装调整(eng).pdf - 第20页
For Ser v ice E n gineer Service Information SI1610004E -000= YSM10_Proced ures for the adjustmen ts required after installing a machine 20/107 3. Ch eck the reference coor dinate of the mark. ( 0.5m…

For Service Engineer
Service Information
SI1610004E-000= YSM10_Procedures for the adjustments required after installing a machine
19/107
4.6 “Orthogonalization Level” adjustment
xy
モヤ
:
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Jig required for the “Orthogonalization Level “adjustment
*
.
Board
Part Name
Part No.
Qty
ACP
PCB ASSY.4
KM0-M8810-40
1
.
AMF
PCB ASSY.1
KM0-M8810-10
Table 13
1. .
モuョゥエヤ
Caution:
I
2. [034 Orthogonalization level] on the CalibSm main menu
to display the following window.
Figure 18
Step 3
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For Service Engineer
Service Information
SI1610004E-000= YSM10_Procedures for the adjustments required after installing a machine
20/107
3. Check the reference coordinate of the mark.
(
0.5mm)
モsエ、
Figure 19
ュ。イォ
“No.1 ァャ。ウウ_0.5_Circle” “MCH_SETUP”
“Mark Adj” .
4. .
Figure 20
5. @
:
<> <>
Figure 21
Item
Specification
0.0015 deg
Table 14
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For Service Engineer
Service Information
SI1610004E-000= YSM10_Procedures for the adjustments required after installing a machine
21/107
6. Perform the measurement again after correcting the data.
7. Make sure that the variation of the perpendicularity falls within the specification.
Item
Specivied value
0.0015 deg
Table 15
8. “Table A-Sub Camera”.
Figure 22
9.
[Trace] .
10. [Teach] and check the mark coordinate with the sub camera.
Rヤ
Figure 23
11.
[Execute] .
12. Check the variation of the perpendicularity.
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