YSM10安装调整(eng).pdf - 第22页
For Ser v ice E n gineer Service Information SI1610004E -000= YSM10_Proced ures for the adjustmen ts required after installing a machine 22/107 4.7 “ BaseMACS ” “BaseMACS” , …
For Service Engineer
Service Information
SI1610004E-000= YSM10_Procedures for the adjustments required after installing a machine
21/107
6. Perform the measurement again after correcting the data.
7. Make sure that the variation of the perpendicularity falls within the specification.
Item
Specivied value
0.0015 deg
Table 15
8. “Table A-Sub Camera”.
Figure 22
9.
[Trace] .
10. [Teach] and check the mark coordinate with the sub camera.
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Figure 23
11.
[Execute] .
12. Check the variation of the perpendicularity.
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For Service Engineer
Service Information
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4.7 “BaseMACS”
“BaseMACS” ,
When is the “BaseMACS”adjustment required? BaseMACS
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Adjustment procedures
1.
[021 BaseMACS] CalibSm “BaseMACS” .
Figure 24
2. “Adjust All” “Adjust Item”
“BaseMACS”
“Ajust All”.
3. [Execute] .
[Execute] , BaseMACS
4.
BaseMACS
5. [Execute] .
[Execute] 0.01mm .
:
,
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“ 301” ( ) . “Setting”
“Machine Data”
“Precision”
“Base MACS” VmSpec .
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Service Information
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4.8 “ ”
:
4.8.1 (“All Exec”)
1.
.
(240x170x1.6mm) .
2.
[009 Vacuum Level] CalibSm
3.
” “Adjust Item”.
Figure 25
4. [Trace] .
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:
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