YSM10安装调整(eng).pdf - 第23页
For Ser v ice E n gineer Service Information SI1610004E -000= YSM10_Proced ures for the adjustmen ts required after installing a machine 23/107 4.8 “ ” �…
For Service Engineer
Service Information
SI1610004E-000= YSM10_Procedures for the adjustments required after installing a machine
22/107
4.7 “BaseMACS”
“BaseMACS” ,
When is the “BaseMACS”adjustment required? BaseMACS
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Adjustment procedures
1.
[021 BaseMACS] CalibSm “BaseMACS” .
Figure 24
2. “Adjust All” “Adjust Item”
“BaseMACS”
“Ajust All”.
3. [Execute] .
[Execute] , BaseMACS
4.
BaseMACS
5. [Execute] .
[Execute] 0.01mm .
:
,
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“ 301” ( ) . “Setting”
“Machine Data”
“Precision”
“Base MACS” VmSpec .
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For Service Engineer
Service Information
SI1610004E-000= YSM10_Procedures for the adjustments required after installing a machine
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4.8 “ ”
:
4.8.1 (“All Exec”)
1.
.
(240x170x1.6mm) .
2.
[009 Vacuum Level] CalibSm
3.
” “Adjust Item”.
Figure 25
4. [Trace] .
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:
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Service Information
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5. .
.
[ ]
Item
Pick Lev. Offset
5
Mount Lev. Offset
5
Repeat
50
Speed
Mes.Pos.Offset Z
0.500
Table 16
6.
.
Ｈ
.
Figure 26
7.
[Execute]
Figure 27
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