晶圆测试说明书Cascade-11861-6-Manual.pdf - 第10页

viii • Summit 11K/12K Pr obe Station User’s Guide M ICRO C HAMBER I NTERLOCK W ARNING The interloc k mechanism f or the load door is managed by the Nucleus system software . Every posible action has been ta ken to ensure…

Safety Standards

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Safety Standards Chapter 2

Introduction

The information in this guide enables you to operate the equipment safely and

effectively. Any deviation from a recommended procedure, or a modification of

the equipment, may create a hazardous operating situation. Cascade Microtech,

Inc. (Cascade) disclaims any responsibility for consequences resulting from any

such deviation, modification, or application.

In this guide, read and follow the instructions labeled:

• Warning(s) and Danger(s) to prevent personal hazard or injury

• Caution(s) to prevent damage or destruction to equipment, or the loss of

data.

• Note(s) for important information.

The S300 probe station is designed to comply with the ETL safety standard for

laboratory equipment; to comply with European directives for machines and

thus, is CE-marked; to comply with the SEMI S3-0200 international standard for

manufacturing quality within the semiconductor industry.

DANGER

To avoid personal injury from electric shock, ground the controller, probe station,

and monitor with the provided power cords. Do not disable the grounded leads on

the power cords.

For continued protection against risk of fire, replace a fuse on probe station

equipment only with a fuse of the specified type and current rating. To avoid injury,

keep hands, clothing, and jewelry clear of all moving parts.

Several probe station components weigh 23 kg (50 lb.) or more. To prevent

personal injury, refer to and follow the lifting guidelines provided by your company.

Use anti-electrostatic discharge (ESD) precautions when you connect cables. ESD

can damage components.

ARNING

Class 3b lasers may be configured on the Summit and are potentially hazardous.

Consult OEM manuals for the provided safety information.

Software Interlocks

LOCK OUT / TAG OUT

See Locking the Workstation in the Nucleus Software User’s Guide.

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Summit 11K/12K Probe Station User’s Guide

MICROCHAMBER INTERLOCK

WARNING

The interlock mechanism for the load door is managed by the Nucleus system

software. Every posible action has been taken to ensure that the stage will stop

correctly. Nevertheless, there is still a chance that the stage will not stop

immediately when the door is opened. When reaching into the stage area, use

caution to avoid personal injury.

This setting controls the actions of the stage when the load door of the station is

opened. Possible values include:

• None — the interlock switch has no effect.

• Warn — when the load door is open, a warning message will be displayed but

the stage will still be able to move as normal.

• Stop Stage — when the load door is open, a warning message will be displayed

and the stage will not be allowed to move. If the door opens during a move, the

move will be interrupted and an error will be generated. When in this mode, an

extra icon is displayed on the status bar.

Safety Labels-Sicherheits Schilder-Etiquettes de sécurité

DANGER LABELS—GEFAHR-SYMBOLE—ETIQUETTES <<DANGER>>

Danger labels warn of immediate danger that could result in severe injury or

death.

GEFAHR-Symbole warnen vor Gefahren, die zu schweren Verletzungen oder

zum Tode fuehren koennen

Les étiquettes de danger préviennent sur la nature de divers dangers qui

pourraient entrainer des blessures sérieuses ou mortelles

VORSICHT – Hochspannung !!

DANGER – Haute Tension

DANGER – High Voltage

Safety Standards

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VORSICHT – Nicht Beruehren !!

DANGER – Risque de se coincer

les doigts - Tenir les mains

éloignées de cet endroit

DANGER – Pinch Point - Keep

Hands Clear

VORSICHT – bewegte Teile

(Chuck) - nicht beruehren

DANGER – Risque de se coincer

les doigts - Etages/plateau

peuvent se deplacer sans

avertissement - Tenir les mains

éloingnées de cet endroit

DANGER – Pinch Point - Stage/

Chuck Moves Unexpectedly -

Keep Hand Clear

ACHTUNG – gefaehrliche

Laserstrahlung wenn offen oder

inaktive Interlocks – nicht in den

Strahlengang sehen

DANGER – Présence de faisceau

laser visible et invisible lorsque

l'appareil est ouvert et le

verrouillage de sécurité est

désactivé. Eviter toute exposition

aux rayons.

DANGER – Visible and invisible

laser radiation when open and

interlocks defeated. Avoid

exposure to beam.