晶圆测试说明书Cascade-11861-6-Manual.pdf - 第39页
Chapter 2: Station Specifications • 15 X-Y S TAGE a Repeatability and accuracy specs are one sigma. Z S TAGE a Repeatability and accuracy specs are one sigma. M ICRO C HAMBER 12500, 12600, 12700, 12800 12100 P RO BE S TA…
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• Summit 11K/12K Probe Station User’s Guide
TOTAL SYSTEM PLANARITY
12100, 12500
Planarity includes error from wafer chuck, theta rotations, and travel flatness.
12600, 12700, 12800
Planarity includes all error sources.
PLATEN
ROLL-OUT STAGE
CHUCK
For in-depth chuck specifications, see the individual station numbers.
Total system planarity <20 micron (0.8 mil) across 101 mm
(4 in.) circle
<30 micron (1.2 mil) across 203 mm
(8 in.) circle
Total system planarity <30 micron (1.2 mil) across 101 mm
(4 in.) circle
<40 micron (1.6 mil) across 203 mm
(8 in.) circle
Rigidity <50 micron (2 mil) for 4.5 kg (10 lb.)
lateral or vertical force
Z-lift range 5.5 mm (0.22 in.) linear lift
Z-lift repeatability < 2 micron (0.08 mil)
Material Nickel-plated steel
Travel 25 cm (10 in.)
Size 200 mm (8 in.) diameter
(150 mm on 6-in. stations)
Travel, rotation ±7°
Resolution, rotation 1° per turn
Surface Gold-plated or nickel-plated aluminum, with
provisions for grounding or biasing
Chapter 2: Station Specifications •
15
X-Y STAGE
a
Repeatability and accuracy specs are one sigma.
Z STAGE
a
Repeatability and accuracy specs are one sigma.
MICROCHAMBER
12500, 12600, 12700, 12800
12100 PROBE STATIONS
The 12100 probe stations are designed so that they can be easily reconfigured and
upgraded.
Chuck Specifications
Travel 203 mm x 203 mm
(8 in. x 8 in.)
Resolution 0.1 micron (.004 mil)
Bearings Cross-roller
Stage travel speed: >51 mm/second (2 in./second)
Repeatability
a
≤ + 1 micron (.04 mil)
Accuracy
a
≤ + 2 micron (.08 mil)
Travel 5 mm (.20 in.)
Resolution 1 micron (.04 mil)
Stage travel speed: >15 mm/second (.6 in/second)
Repeatability
a
≤ + 1 micron (.04 mil)
Accuracy
a
≤ + 2 micron (.08 mil)
EMI Isolation Yes
Light tight Yes
Enclosure Dry air, inert gas purge capable
Maximum number of positioners Eight DCM (seven with high-power
microscope) or four RF
Flatness 10-micron (0.39 mil) across total
surface
Isolation, chuck to base > 10 TΩ
Auxiliary chucks Two with individual vacuum control
Breakdown bias voltage > 1000-volts
Vacuum distribution area 13, 75, or 152 mm (selectable)
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• Summit 11K/12K Probe Station User’s Guide
12500 GUARDED PROBE STATIONS
The 12500 has a triaxial guarded architecture. The station provides a low residual-
capacitance measurement environment for substrate measurements. By
eliminating residual capacitance, the 12500 enables precise, low-level
measurements without using integration intervals. Typical improvements are
from 100 to 1000 times in the sub-pA measurement range.
The MicroChamber works as a Faraday cage to further reduce chuck variation to
30 fF (12550), and as low as 3 fF (12560) with the AttoGuard version. This feature
enables you to measure capacitance without having to null position-dependent
capacitance changes.
Chuck Specifications
Flatness 10 micron (0.39 mil) across total
surface
Residual capacitance, chuck to shield
(FemtoGuard version)
< 20 pF
Residual capacitance, chuck to shield
(AttoGuard version)
< 0.2 pF
Capacitance variation over chuck
surface
≤ 3 fF with AttoGuard
≤ 30 fF with FemtoGuard
Isolation, chuck to shield > 10 TΩ
Breakdown bias voltage > 1000-volts
Chuck leakage current after 10
seconds (FemtoGuard version)
5 fA @ 0-volts
10 fA @ 10-volts
20 fA @ 100-volts
Chuck leakage current after 10
seconds (AttoGuard version)
3 fA @ 0 -100-volts
Vacuum distribution area 13, 75, or 152 mm (selectable)
Auxiliary chucks Two with individual vacuum control