晶圆测试说明书Cascade-11861-6-Manual.pdf - 第27页
Chapter 1: Station Overview • 3 • Probe stati on controls reside outs ide th e enclosed area to provide easy access to probe positioners, the micros cope and positioning controls. Interlock Switches for Access Door To pr…
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Summit 11K/12K Probe Station User’s Guide
FemtoGuard/AttoGuard Chuck Options
The patented FemtoGuard/AttoGuard chucks and guarded coaxial probes
provide an ultra-low capacitance for swept measurements without capacitive
error currents.
The FemtoGuard option increases guarding on the chuck and in the
MicroChamber so you can measure currents in the low femtoamp range.
The AttoGuard option extends the instrument guard under, around, and over the
wafer, providing shielding to femtoamp noise levels.
MICROCHAMBER
The patented MicroChamber is an enclosure surrounding the chuck, providing a
controlled probing environment that shields wafer and probes from moisture,
light, and electrical noise.
•The wafer is protected inside the MicroChamber. Probes are never jarred off
submicron targets by closing dark box or MicroChamber doors.
• You can electrically isolate the MicroChamber from the probe station and
purge it with dry air or inert gas.
Fig. 1. Summit 11500, 11700, 12500, 12700 and 12800 Guarded Chuck Connections.
Chuck shield layer and
MicroChamber connection
Chuck bias
triax connector
Chuck guard layer
connection
Chuck surface
connection
Guard ring
Fig. 2. Attoguard.
Chapter 1: Station Overview
•
3
• Probe station controls reside outside the enclosed area to provide easy access
to probe positioners, the microscope and positioning controls.
Interlock Switches for Access Door
To protect you from hazardous voltages on the chuck, the MicroChamber
provides two access-door interlock switches. The software-controlled switch
closes when the MicroChamber access door closes, and opens when the access
door opens. In addition, a hardware interlock BNC is on the right rear of the
probe station (fig. 9 on p. 26 and fig. 10 on p. 26). You must connect a cable from
the BNC connector to the interlock connector on the chuck-biasing power supply.
PRECISION POSITIONING
12000-Series Only
The closed-loop position feedback system provides micron accuracy for test
measurements. Submicron moves enable you to test the smallest wafer
geometries. Stepper motors ensure fast and quiet X-Y-Z positioning.
COMPUTER CONNECTION
12000-Series Only
System electronics are integrated into the probe-station's base, with a single
control cable connecting the station to the computer.
See also, the Facility and Computer Requirements section for more information
about the minimum computer configuration.
Fig. 3. MicroChamber, access door, and roll-out stage.
Roll-out
stage
handle
Chuck
MicroChamber
MicroChamber
access door
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Summit 11K/12K Probe Station User’s Guide
MICROSOFT WINDOWS-BASED SOFTWARE
12000-Series Only
You control your probe station using Microsoft Windows-based software, which
includes online help. The software includes:
• Probe station control software (PCS or Nucleus) that enables you to manage
the probe station and prepare it for automatic testing. See the Nucleus or PCS
User’s Guides for detailed software information.
• Self-test utility to verify hardware
• Probe plan editor that enables point-and-click die selection
• Optional WinCal VNA calibration software that enables you to use any
standard vector network analyzer
NOTE
Many software test applications are available to work with prober control software,
such as HP VEE, Metrics I/CV, Labview, Basic for Windows, Visual Basic, HPIC-
CAP, BSim Pro, V+most, etc. Call CMI Customer Support for details.
As a true Microsoft Windows application, the software includes:
• Dynamic link and data exchange server (DDE), which enables other Windows
programs to control the probe station
• GPIB, which enables a remote host to control the probe station
X-Y STAGE
The stage has manual controls for moving in the X and Y-axes. There is also a
theta control for rotating the chuck (fig. 4).
Fig. 4. X-Y Stage and theta Controls.
Y-axis Control
X-axis Control
Theta Control