晶圆测试说明书Cascade-11861-6-Manual.pdf - 第56页

32 • Summit 11K/12K Probe Station User’ s Guide 2. Remove the (2) #6 thumbscr ews from the back cover ( fig. 18 ) . Set aside for use in a later step. 3. Slide the back cover off by moving it toward the rear of the stati…

Chapter 3: Installing •

To remove the x-y stage shipping restraint

1. Unscrew the (2) #8 screws holding the X-Y stage shipping restraint (marked

with a red tag) and remove (fig. 16).

LARGE-AREA MICROSCOPE BRIDGE MOUNT

To remove the optics bridge mount shipping restraints

The optics bridge has six shipping restraints: two in the front, two in the back, and

two on the counterbalance. To remove them, you need a 9/64-inch hex wrench.

To remove the shipping blocks and spacers

1. With the 9/64-inch hex wrench, remove the two #8-32 screws securing the

shipping bracket to the front of the lift plate and the top plate (fig. 17). Save

the screws.

Fig. 16. X-y stage shipping restraint.

X-Y stage

shipping restraint

Capscrews

Fig. 17. Bridge shipping restraints.

• Summit 11K/12K Probe Station User’s Guide

2. Remove the (2) #6 thumbscrews from the back cover (fig. 18). Set aside for use

in a later step.

3. Slide the back cover off by moving it toward the rear of the station (fig. 18).

4. With the 9/64-inch hex wrench, remove the (2) #8 screws that hold the

counterbalance located under the rail plate (fig. 19).

WARNING

The counterbalance is heavy. Do not lift it by putting your hands on the

counterbalance itself. Otherwise, you could smash your fingers. Instead, lift the

counterbalance by pressing down on the microscope mounting plate and remove

the two restraints under the counterbalance.

5. Press down on the microscope mounting plate (fig. 17 on p. 31) to raise the

counterbalance about an inch. Hold the mounting plate down at the same

time you remove the shipping spacers from underneath the counterbalance.

See figure 20 for the location of the counterbalance spacers.

Fig. 18. Back cover removal.

Back

Thumb Screw

Front

Fig. 19. Screw removal on the rail plate (bottom view).

Screws to hold the

optics bridge mount

shipping restraints

Screws to hold the

counterbalance

Chapter 3: Installing •

6. Slowly raise the microscope mounting plate to return the counterbalance to a

resting position.

7. Replace the back cover by sliding it into the slots in the top and secure the

cover with the (2) #6 thumb screws set aside in step two. Make sure the front

edge of the back cover slides into the slots in the front plate.

8. Use the 9/64-inch hex wrench to remove the (2) #8 screws (on the underside

of the rail plate) which hold the shipping blocks (fig. 20).

9. Use the 9/64-inch hex wrench to remove the (2) #8 screws holding the same

two shipping blocks to the beam, as shown in figure 20.

10.Use the 9/64-inch hex wrench to remove the (2) #8 screws holding the third

shipping block (fig. 20 and fig. 21) between the front plate and beam.

Save all shipping blocks and #8 screws with the rest of the packing materials.

HIGH-STABILITY MICROSCOPE BRIDGE MOUNT

To remove the optics bridge mount shipping restraints

This step requires a ¼-inch hex wrench.

Fig. 20. Shipping blocks and counterbalance spacers (rear view).

Shipping blocks

Shipping spacers

Screws for shipping blocks

Fig. 21. Shipping blocks (front view).

Shipping block