晶圆测试说明书Cascade-11861-6-Manual.pdf - 第93页
Chapter 6: Troubleshooting • 69 CHAPTER 6 T r oubleshooting Chapter 8 If you do not resolve the failure after following the steps in this section, contact Cascade Technical Support at (800) 626-9395 This section covers c…
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• Summit 11K/12K Probe Station User’s Guide
Chapter 6: Troubleshooting •
69
CHAPTER
6
Troubleshooting Chapter 8
If you do not
resolve the failure
after following the
steps in this section,
contact Cascade
Technical Support
at (800) 626-9395
This section covers common probe station problems. Diagnostic and repair
actions are described to help you repair the most common of problems. This
section does not cover invasive troubleshooting or component-level repair.
Attempting to troubleshoot beyond the instructions in this section may cause
further damage to your probe station or related equipment and may also void
your warranty.
Symptoms and Solutions
Find the symptom that most closely matches your problem, and check everything
listed in the table.
For 12000-series stations, run Verify (the hardware verification software), after
you resolve your problem and before you begin operating your probe station.
This section shows how to resolve the following symptoms:
• Computer does not turn on; nothing works (12000-series only)
• X-Y stage makes high-pitched whine when attempting to move (12000-series
only)
• X-Y stage or Z stage does not move
• Vacuum is not detected by the sensor or the wafer is not held on chuck
• Joystick error message on monitor or Stage wanders in joystick mode (12000-
series only)
• Microscope light is not on
The following section shows how to resolve problems with thermal stations:
• Thermal controller shuts down
• Set, and actual temperature do not match
• Frost or moisture appears in the MicroChamber
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• Summit 11K/12K Probe Station User’s Guide
COMPUTER DOES NOT TURN ON; NOTHING WORKS
(12000-series Only)
STAGE WHINES ON ATTEMPTED MOVE
(12000-series Only)
WARNING
First, turn the power OFF.
Area to check Check this Refer to
Computer Reseat all boards. Installing
Battery on motherboard
OK?
––
Power line voltage
switch correct for lab?
Installing
Plugged in and turned
on?
Installing
Boots as stand-alone
computer?
––
Cables Installed correctly? Installing
Installed in correct slots
at both ends?
Installing
No bent pins on
connectors?
––
Area to check Check this Refer to
X-Y stage or Z stage Shipping restraint
removed?
Installing
MicroChamber Shipping restraints
removed?
Installing