晶圆测试说明书Cascade-11861-6-Manual.pdf - 第55页

Chapter 3: Installing • 31 T o remove the x-y stage shipping restraint 1. Unscrew the (2) #8 screws holding the X-Y stage shipping restraint (marked with a red tag) and remove ( fig. 16 ). L ARGE -A REA M ICROSCOPE B RID…

• Summit 11K/12K Probe Station User’s Guide

To remove the platen shipping restraints

1. There are three short metal blocks screwed in place under the platen on the

right and left sides of the station. You must carefully remove the blocks to

prevent them from falling inside the station (fig. 15).

2. Loosen (1/16 to 1/8-inch), but do not remove, the top #8 screws holding the

blocks in place.

3. Slightly raise the platen (with the Z-lever) to release the pressure on the

shipping blocks.

4. Rotate each block one-quarter turn; hold onto each block; remove its screw;

then remove the block.

Fig. 15. Platen shipping restraints.

Chapter 3: Installing •

To remove the x-y stage shipping restraint

1. Unscrew the (2) #8 screws holding the X-Y stage shipping restraint (marked

with a red tag) and remove (fig. 16).

LARGE-AREA MICROSCOPE BRIDGE MOUNT

To remove the optics bridge mount shipping restraints

The optics bridge has six shipping restraints: two in the front, two in the back, and

two on the counterbalance. To remove them, you need a 9/64-inch hex wrench.

To remove the shipping blocks and spacers

1. With the 9/64-inch hex wrench, remove the two #8-32 screws securing the

shipping bracket to the front of the lift plate and the top plate (fig. 17). Save

the screws.

Fig. 16. X-y stage shipping restraint.

X-Y stage

shipping restraint

Capscrews

Fig. 17. Bridge shipping restraints.

• Summit 11K/12K Probe Station User’s Guide

2. Remove the (2) #6 thumbscrews from the back cover (fig. 18). Set aside for use

in a later step.

3. Slide the back cover off by moving it toward the rear of the station (fig. 18).

4. With the 9/64-inch hex wrench, remove the (2) #8 screws that hold the

counterbalance located under the rail plate (fig. 19).

WARNING

The counterbalance is heavy. Do not lift it by putting your hands on the

counterbalance itself. Otherwise, you could smash your fingers. Instead, lift the

counterbalance by pressing down on the microscope mounting plate and remove

the two restraints under the counterbalance.

5. Press down on the microscope mounting plate (fig. 17 on p. 31) to raise the

counterbalance about an inch. Hold the mounting plate down at the same

time you remove the shipping spacers from underneath the counterbalance.

See figure 20 for the location of the counterbalance spacers.

Fig. 18. Back cover removal.

Back

Thumb Screw

Front

Fig. 19. Screw removal on the rail plate (bottom view).

Screws to hold the

optics bridge mount

shipping restraints

Screws to hold the

counterbalance