晶圆测试说明书Cascade-11861-6-Manual.pdf - 第94页
70 • Summit 11K/12K Probe Station User’ s Guide C OMPUTER D OES N OT T URN O N ; N OTHING W ORKS (12000-series Only) S TAGE W HINES ON A TTEMPTED M OVE (12000-series Only) W ARNING First, turn the pow er OFF . Area to ch…
Chapter 6: Troubleshooting •
69
CHAPTER
6
Troubleshooting Chapter 8
If you do not
resolve the failure
after following the
steps in this section,
contact Cascade
Technical Support
at (800) 626-9395
This section covers common probe station problems. Diagnostic and repair
actions are described to help you repair the most common of problems. This
section does not cover invasive troubleshooting or component-level repair.
Attempting to troubleshoot beyond the instructions in this section may cause
further damage to your probe station or related equipment and may also void
your warranty.
Symptoms and Solutions
Find the symptom that most closely matches your problem, and check everything
listed in the table.
For 12000-series stations, run Verify (the hardware verification software), after
you resolve your problem and before you begin operating your probe station.
This section shows how to resolve the following symptoms:
• Computer does not turn on; nothing works (12000-series only)
• X-Y stage makes high-pitched whine when attempting to move (12000-series
only)
• X-Y stage or Z stage does not move
• Vacuum is not detected by the sensor or the wafer is not held on chuck
• Joystick error message on monitor or Stage wanders in joystick mode (12000-
series only)
• Microscope light is not on
The following section shows how to resolve problems with thermal stations:
• Thermal controller shuts down
• Set, and actual temperature do not match
• Frost or moisture appears in the MicroChamber
70
• Summit 11K/12K Probe Station User’s Guide
COMPUTER DOES NOT TURN ON; NOTHING WORKS
(12000-series Only)
STAGE WHINES ON ATTEMPTED MOVE
(12000-series Only)
WARNING
First, turn the power OFF.
Area to check Check this Refer to
Computer Reseat all boards. Installing
Battery on motherboard
OK?
––
Power line voltage
switch correct for lab?
Installing
Plugged in and turned
on?
Installing
Boots as stand-alone
computer?
––
Cables Installed correctly? Installing
Installed in correct slots
at both ends?
Installing
No bent pins on
connectors?
––
Area to check Check this Refer to
X-Y stage or Z stage Shipping restraint
removed?
Installing
MicroChamber Shipping restraints
removed?
Installing
Chapter 6: Troubleshooting •
71
X-Y STAGE OR Z STAGE DOES NOT MOVE
VACUUM NOT DETECTED BY SENSOR OR WAFER NOT HELD ON CHUCK
JOYSTICK ERROR MESSAGE OR STAGE WANDERS IN JOYSTICK MODE
(12000-series Only)
Area to check Check this Refer to
Probe station
12000 and 11000-series
Shipping restraint
removed?
Installing
12000-series Fuses OK? ––
Plugged in and turned
on?
Installing
Main control cable
12000-series
Installed correctly? Installing
Installed in correct slots
at both ends?
Installing
No bent pins on
connectors?
Installing
Area to check Check this Refer to
Vacuum supply
12000 and 11000-series
Turned on? ––
At least 400 mm (15 in.)
of Hg?
––
Connected to VAC IN
on probe station?
Installing
Your DUT Flat on the chuck? ––
Centered on the
chuck?
––
Center vacuum size set
to not larger than your
DUT?
Verifying and Operating
Aux stage vacuum Correct size device(s) in
place where vacuum is
on?
Verifying and Operating
Turned off where not
used?
Verifying and Operating
Area to check Check this Refer to
Joystick tension Set to return the joystick
to center?
Reset, then reinitialize.
Verifying and Operating
Joystick cable Connected to
computer?
Reconnect, then
reinitialize.
Installing
If none of the above eliminates the problem, recalibrate the joystick. Refer to
the Control Panel in Windows.