晶圆测试说明书Cascade-11861-6-Manual.pdf - 第102页

78 • Summit 11K/12K Probe Station User’ s Guide

Chapter 7: Service •

CHAPTER

Service Chapter 9

This section explains what to do when your Cascade customer service

representative requests that you return the probe station for service.

Probe station repairs carry either a 90-day warranty or the balance of your

original probe station warranty if greater.

Preparing to Ship

RMA NUMBER

Before shipping a probe station to Cascade, obtain a Return Material

Authorization number (RMA #). Contact your nearest Cascade sales office or

Cascade customer service at (800) 550-3279.

Write the following information on a tag and attach it to the probe station:

• Owner's name and address

•RMA number

• Probe station model number

• Probe station serial number (back left of probe station)

• Description of the service required or failure indications

REPACKING

To pack probes and

accessories, see

specific product

documentation.

Always use the original packing materials. Otherwise, you’ll void your warranty.

If you cannot locate the shipping materials or hardware, contact your Cascade

representative.

Remove all probes and accessories from the probe station, including the

microscope. Do not ship them unless they are associated with the failure

symptoms.

To disconnect and disassemble the probe station, and attach the shipping

restraints, reverse the steps in the Installing section of this manual.

• Summit 11K/12K Probe Station User’s Guide

Glossary •

Glossary Chapter 1

Air Dryer An air dryer is a device that reduces the relative humidity of the MicroChamber

purge air to a dew point of -70°C (-94°F).

AttoGuard The AttoGuard extends the instrument guard under, around, and over the wafer,

providing shielding to femtoamp levels. AttoGuarding also reduces residual

chuck capacitance from hundreds of pF to 1pF and below.

Boom Stand The boom stand is a microscope attachment system that allows you to swing the

microscope away from the work area.

Chuck Bias Chuck bias is an option to apply a voltage to the chuck and, therefore, to the wafer

or substrate for DC/CV tests.

Computer Cascade's Windows-based prober control software package runs on an IBM-

compatible PC computer.

Connection

Panel Option

The connection panel option consists of triax BNC and banana/pin jack

connectors, and a vacuum manifold. Provides feed-through connectors to reduce

strain on probes and positioners. Reduces triboelectric noise.

Cooler/

Circulator

The Cooler/circulator is a device that chills the thermal chuck to the set low

temperature.

DDE Server The Dynamic Data Exchange (DDE) application software provides communication

with other application software running on your computer. Refer to the Probe

Station Communications Guide or the DDE Server online Help.

Dry Air Dry air can be air or nitrogen with a dew point of -70°C (-94°F).

DUT DUT is Device-Under-Test. It can be a wafer, substrate, or other circuit to be tested.

FC-77 Also called Flourinert. Alternate coolant used in cooler/circulator for thermal

probe station. It is inert, non-toxic, and non-flammable.

FemtoGuard The FemtoGuard increases chuck guarding to enable current measurements in the

low femto-amp range.

Guarded

Chuck

The Guarded chuck reduces leakage currents by using a conductive material that

is nearly at the same potential as the signal that you are trying to measure. It is

electrically isolated from the rest of the probe station and includes connections to

apply a voltage to the DUT for DC and CV characterization.

Isopropyl

Alcohol (IPA)

IPA is a toxic, flammable fluid approved for cleaning chuck top and exterior

surfaces.

Joystick The joystick is a device for controlling the x-y stage motion. The joystick is

activated by Cascade's joystick software application.