晶圆测试说明书Cascade-11861-6-Manual.pdf - 第24页

xxii • Summit 11K/12K Probe Station User’s Guide

Contents •

xxi

Tips for Using the Low-noise, Guarded Thermal Chuck ................................74

Service 77

Preparing to Ship ...............................................................................................77

RMA Number ...................................................................................................77

Repacking .......................................................................................................77

Glossary 79

Index 81

xxii

• Summit 11K/12K Probe Station User’s Guide

Chapter 1: Station Overview

•

CHAPTER

Station Overview Chapter 3

This overview covers:

• General features of the Summit 11000-series (manually-operated) and 12000-

series (semiautomatic) analytical probe stations

• Applications

• Facilities and computer requirements

• Optional accessories

• Standard accessories

• Recommended configurations

• Environmental considerations

• How to use the emergency stop button (EMO)

Features

The Summit 11500-, 12500-, 11600-, 12600-, 11700-, 12700-, and 11800-, 12800-series

probe stations enable you to make test measurements inside an integral, low-

noise, shielded and light-tight MicroChamber.

CHUCK: SUMMIT 11500, 12500, 11700, 12700 AND 11800, 12800

This chuck is isolated and guarded, making it ideal for ultra-low-level leakage DC

and CV measurements. The chuck guard connects to the external test equipment’s

Source Monitor Unit (SMU) guard. A connection panel provides convenient

triaxial or quadraxial connections.

The low-capacitance, guarded-chuck environment enables you to make accurate

current and voltage measurements. The chuck significantly reduces

measurement-settling time and eliminates the need to make offset capacitance

corrections.

Two Kelvin-type triax connectors for chuck-bias voltage and sense, or for chuck

grounding, are located on the left back of the MicroChamber. The access door

includes an interlock switch and connector so you can automatically turn off the

chuck biasing power supply when you open the door.

Guarded Thermal Chuck Option

A guarded version of the thermal chuck reduces chuck noise down to femtoamp

level.